From seymour at snf.stanford.edu Mon Oct 8 15:19:18 2001 From: seymour at snf.stanford.edu (ray seymour) Date: Mon, 08 Oct 2001 15:19:18 -0700 Subject: silane cylinder Message-ID: <3BC22665.40703ED4@snf.stanford.edu> The silane cylinder is near its end of life and need to be replaced. I would like to do this on Wednesday 10/10 and have the cylinder on leak check until Thursday 10/11. If you have any questions please contact me at 4-7425. From seymour at snf.stanford.edu Wed Oct 10 08:05:14 2001 From: seymour at snf.stanford.edu (ray seymour) Date: Wed, 10 Oct 2001 08:05:14 -0700 Subject: silane cylinder change Message-ID: <3BC463A9.A849CC42@snf.stanford.edu> the silane cylinder is being changed and the tools will be down until tomorrow (10/11 for leak test. From seymour at snf.stanford.edu Thu Oct 11 07:29:11 2001 From: seymour at snf.stanford.edu (ray seymour) Date: Thu, 11 Oct 2001 07:29:11 -0700 Subject: silane status Message-ID: <3BC5ACB7.12E9A410@snf.stanford.edu> The silane cylinder passed leak check and the tool is up to use. From aaronp at micromachine.stanford.edu Sat Oct 13 17:15:58 2001 From: aaronp at micromachine.stanford.edu (Aaron Partridge) Date: Sat, 13 Oct 2001 17:15:58 -0700 Subject: typlanbpsg free sunday night Message-ID: wafers not ready. i may not get in to remove my reservation from sunday 16:00 to monday morning -- just go ahead if you need it. aaron. From amol at stanford.edu Sun Oct 14 11:24:20 2001 From: amol at stanford.edu (Amol Joshi) Date: Sun, 14 Oct 2001 11:24:20 -0700 (PDT) Subject: Aaron's reservation Message-ID: Hi, I would like to take Aaron's BPSG reservation today evening. - Amol From mdickey at snf.stanford.edu Tue Oct 30 09:45:50 2001 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Tue, 30 Oct 2001 09:45:50 -0800 Subject: [Fwd: failure notice] Message-ID: <3BDEE74D.2EECCB6@snf.stanford.edu> -------------- next part -------------- An embedded message was scrubbed... From: MAILER-DAEMON at snf.stanford.edu Subject: failure notice Date: 30 Oct 2001 17:40:46 -0000 Size: 1522 URL: From mdickey at snf.stanford.edu Tue Oct 30 09:48:12 2001 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Tue, 30 Oct 2001 09:48:12 -0800 Subject: Pull and Clean Message-ID: <3BDEE7DC.F72E67DC@snf.stanford.edu> We are going to put the BPSG tube down for a pull and clean tomorrow morning. From balaji at sunray.snffab.stanford.edu Tue Oct 30 14:44:46 2001 From: balaji at sunray.snffab.stanford.edu (Balaji Venkateshwaran) Date: Tue, 30 Oct 2001 14:44:46 -0800 (PST) Subject: stripping dummies in BPSG Message-ID: <200110302244.OAA21764@sunray.snffab.stanford.edu> BPSG Users, Due to confusion in log book entries, I had to spend a good portion of my morning trying to figure out who stripped the dummies previously and when. LTO thickness on the dummies is at 4.2um !! Somebody before me should have stripped the dummies *** WHEN IT REACHED 3um *** and I'm having to do your job now. Part of this was due to confusing entries in the log book for the previous dummy cleans. I would recommend anyone cleaning dummies to UNAMBIGUOUSLY record the process in the log book. Leave a blank line, write in a separate row, whatever ... make sure you put it down clear enough in a separate line so the next person is sure of the dummy thickness. Balaji From liji at intpax.com Wed Oct 31 11:42:03 2001 From: liji at intpax.com (Liji Huang) Date: Wed, 31 Oct 2001 11:42:03 -0800 Subject: stripping dummies in BPSG References: <200110302244.OAA21764@sunray.snffab.stanford.edu> Message-ID: <3BE0540B.5020108@intpax.com> Also please clean the dummy wafers after changing them, please DONOT leaving the dummies on top of the wet bench for someone else to clean. For the last batch, it takes more than 30 min in BOE to clean some of the dummies so everybody can guess how thick the oxide is. Balaji Venkateshwaran wrote: > BPSG Users, > > Due to confusion in log book entries, I had to spend a good portion of my > morning trying to figure out who stripped the dummies previously and when. > LTO thickness on the dummies is at 4.2um !! > Somebody before me should have stripped the dummies *** WHEN IT REACHED 3um *** > and I'm having to do your job now. > > Part of this was due to confusing entries in the log book for the previous dummy > cleans. I would recommend anyone cleaning dummies to UNAMBIGUOUSLY record the > process in the log book. Leave a blank line, write in a separate row, whatever > .... make sure you put it down clear enough in a separate line so the next person > is sure of the dummy thickness. > > > Balaji > > > >