From seymour at snf.stanford.edu Tue Aug 6 07:13:28 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 06 Aug 2002 07:13:28 -0700 Subject: silane change Message-ID: <3D4FD988.B79C454F@snf.stanford.edu> The cylinder has been changed and the leak check passed From rcrane at snf.stanford.edu Tue Aug 6 18:27:11 2002 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 06 Aug 2002 18:27:11 -0700 Subject: Silane for the LP tubes Message-ID: <3D50776F.701E0714@snf.stanford.edu> It is with great embarrassment that I am writing this email concerning running out of silane late Sunday night. How could this happen? When it happened several months ago I instituted some changes in our method of monitoring the process gases. Cylinder weight or pressure was checked and recorded daily. Trends were plotted. Arrangements with purchasing were made to insure replacement product would be here in a timely fashion. We haven't had an another oops until now. What happened? As of last week the projected run out time was next week. After-the-fact calculations suggest there was enough silane to go into this week. The cylinder supplies BPSG, SiGe, Poly, and Tystar tubes. The multiple user aspect further complicates predicating use rates. Two sources of error are being pursued: 1.The cylinder pressure gauge may have an offset and/or be non-linear. The gauge will be replaced at next cylinder change. 2. The gas volume vs. pressure curve may be non-linear at low pressures. More important is how to not have this happen again. Action items: 1. I am pursuing an automatic changeover, two cylinder manifold which would allow a second cylinder of silane to come on line when the first cylinder reaches a predetermined level. This change would also make the 24 hr leak test invisible to users. Because of permits and construction issues, this upgrade will take a few months to implement. 2. For the time being, when the cylinder reaches the 25% volume remaining level, a "Silane Budget Sheet" will be posted near the cleanroom entrance and a notice will be sent to users. Silane users will need to sign up for the number of ccs to be used. The procedure will allow users with critical runs to chose between running now, close to the end, or waiting for a cylinder change in a few days. The budget sheet should answer the question of "Is there enough silane to complete my run this evening (or weekend)?" and help coordinate use between users of different tubes. Gas data is taken every weekday morning before 0700. Please feel free to ask me, Ted, Ray, or Mike Dickey what the silane level at any time during the day. I would also like to ask for your help. If you have run scheduled which uses a large amount of silane, please notify us ahead of time. My apologies to the two users who ran out this weekend, Dick From mdickey at snf.stanford.edu Fri Aug 16 09:55:32 2002 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Fri, 16 Aug 2002 09:55:32 -0700 Subject: Pull and clean Message-ID: <3D5D2E84.87B41D17@snf.stanford.edu> To all concerned users: The LTO tube (BPSG) is coming close to needing a pull and clean. Please schedule accordingly. It will probably be done next week. From tberg at snf.stanford.edu Mon Aug 19 09:41:01 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 19 Aug 2002 09:41:01 -0700 Subject: Going down for pull and clean tomorrow morning Message-ID: <3D611F9D.ABB175D@snf.stanford.edu> Hello all, After talking to Gladys we have decided to take BPSG down tomorrow morning for pull and clean sorry but it looks like there is never a break in the reservations. Itshould be up by Wednesday afternoon. From mdickey at snf.stanford.edu Tue Aug 20 14:49:02 2002 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Tue, 20 Aug 2002 14:49:02 -0700 Subject: Status Message-ID: <3D62B94E.ACD4DDB2@snf.stanford.edu> Tube pull and clean is just about done. The tube is currently heating up and will be coated tomorrow morning. After the pump screen and oil/filter change tube will be ready for testing From mdickey at snf.stanford.edu Mon Aug 26 14:58:34 2002 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Mon, 26 Aug 2002 14:58:34 -0700 Subject: Tube down Message-ID: <3D6AA48A.82BBF827@snf.stanford.edu> The injector port of the tube is broken. Tube will have to be replaced. Will start tomorrow morning. From mdickey at snf.stanford.edu Tue Aug 27 10:42:26 2002 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Tue, 27 Aug 2002 10:42:26 -0700 Subject: Test Message-ID: <3D6BBA02.1280E06E@snf.stanford.edu> The tube has been replaced and is leak tight. As soon as it comes up to temp. It will be ready for testing From zappe at stanford.edu Thu Aug 29 11:23:01 2002 From: zappe at stanford.edu (Stefan Zappe) Date: Thu, 29 Aug 2002 11:23:01 -0700 Subject: Free today from 13:30-18:30 Message-ID: <5.1.0.14.2.20020829111959.022dab00@zappe.pobox.stanford.edu>