From seymour at snf.stanford.edu  Wed Jan  2 10:04:43 2002
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Wed, 02 Jan 2002 10:04:43 -0800
Subject: Phosphine cylinder change.
Message-ID: <3C334BBB.74E5C8F8@snf.stanford.edu>

The phosphine cylinder has been changed and leak check is now under way.
The tool will be up tomorrow morning at approx 9 am if all is okay.



From seymour at snf.stanford.edu  Thu Jan  3 10:18:37 2002
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Thu, 03 Jan 2002 10:18:37 -0800
Subject: tube is up
Message-ID: <3C34A07D.B49A6B11@snf.stanford.edu>

The phosphine passed leak check.



From yyao at snf.stanford.edu  Sat Jan 12 19:30:34 2002
From: yyao at snf.stanford.edu (Yahong Yao)
Date: Sat, 12 Jan 2002 19:30:34 -0800
Subject: LTO dummies
Message-ID: <3C40FF5A.F2B605F5@snf.stanford.edu>

Hello All,

When I loaded the clean dummies to the boat, I found a whole cassette
of  metal dummies which were not completely cleaned.  There was still
some visible LTO on wafers.  We should just let the dummies sit in 6:1
BOE for a little longer to prevent this from happening.  Please just be
considerate.

yyao



From seymour at snf.stanford.edu  Mon Jan 14 13:47:44 2002
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Mon, 14 Jan 2002 13:47:44 -0800
Subject: shutdown for clean
Message-ID: <3C435200.790A118@snf.stanford.edu>

I had to shutdown the tube for an unscheduled clean due to particles
found in the tube and on the wafers on the weekend.



From mcvittie at snf.stanford.edu  Wed Jan 16 15:50:36 2002
From: mcvittie at snf.stanford.edu (Jim McVittie)
Date: Wed, 16 Jan 2002 15:50:36 -0800
Subject: Need Help With LTO Deposition
Message-ID: <3C4611CC.2F85A3FA@snf.stanford.edu>

LTO Users,

There is a visitor from Israel who needs some help depositing LTO. He is
only here for a month and Gladys can't train him for a week. He needs
2.5 um of LTO deposited for the 1st step in his process. If you can help
him, please let me know.

    Thanks,   Jim