From jenwang at stanford.edu Thu Jul 18 21:54:11 2002 From: jenwang at stanford.edu (Jen-Shiang Wang) Date: Thu, 18 Jul 2002 21:54:11 -0700 Subject: How to strip the oxide on metal dummies? Message-ID: <020201c22ee0$52fefdb0$1c5640ab@ganymede> Hi, Does anyone know how to strip the oxide on metal dummies since the 6:1 BOE tank at the wbsilicide is gone and the 50:1 HF tank is labeled with "used with own risk for potential contamination". Thanks, Jen-Shiang ============================== Jen-Shiang Wang, MS/PhD student Department of Electrical Engineering Stanford University TEL: (650)723-6104 FAX: (650)725-7509 -------------- next part -------------- An HTML attachment was scrubbed... URL: From gladys at snf.stanford.edu Mon Jul 22 08:36:21 2002 From: gladys at snf.stanford.edu (Gladys Sarmiento) Date: Mon, 22 Jul 2002 08:36:21 -0700 Subject: metal dummies Message-ID: <3D3C2674.DE284324@snf.stanford.edu> To all LTO users: The oxide stripping of the metal dummies is temporarily done at the wbmetal BOE pot. Use 6:1 instead and note it at the log sheet. There's no 6:1 BOE pot available for the oxide strip at the wbsilicide. Gladys -- Gladys Sarmiento Stanford Nanofabrication Facility 420 Via Mall, CIS 145 Stanford, CA 94305-4070 (650) 725-6199 gladys at snf.stanford.edu From seymour at snf.stanford.edu Fri Jul 26 07:23:59 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 26 Jul 2002 07:23:59 -0700 Subject: tube clean Message-ID: <3D415B7F.2DA70FED@snf.stanford.edu> The BPSG is appraoching the 30 micron tube clean thickness. This will be done on Wed. 7/31, unless the tube reaches the thickness that requires it to be done sooner.