metal dummies

[Gladys Sarmiento]

To all LTO users:
The oxide stripping of the metal dummies is temporarily done at the
wbmetal
BOE pot. Use 6:1 instead and note it at the log sheet.
There's no 6:1 BOE pot available for the oxide strip at the wbsilicide.

Gladys


--
Gladys Sarmiento
Stanford Nanofabrication Facility
420 Via Mall, CIS 145
Stanford, CA 94305-4070
(650) 725-6199
gladys at snf.stanford.edu