From tberg at snf.stanford.edu  Mon Nov 18 07:02:22 2002
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 18 Nov 2002 07:02:22 -0800
Subject: Problem with broken Quartz
Message-ID: <3DD900FE.39552D9D@snf.stanford.edu>

Mike  replaced the broken top for the LTO carrier and it is back to
yellow for uniformity reasons.ted



From tberg at snf.stanford.edu  Wed Nov 20 13:52:49 2002
From: tberg at snf.stanford.edu (Ted Berg)
Date: Wed, 20 Nov 2002 13:52:49 -0800
Subject: Why the Burn Box is our Friend
Message-ID: <3DDC0430.D75A0D9F@snf.stanford.edu>

Greetings all,
    As some or all of you might know the tools listed all go to one
CDO(BurnBox), The job of the burn box is to take whatever nasty stuff we
run in the furnaces, that does not react to make our desired film, and
break it down to a water soluable by-product.  This is a tough job for
our friend the burn box especially if we run 14:1 DCS to NH3 ratio where
a large amount of gas goes unreacted. In normal operation just a slight
amount of excess gas enters the burn box which runs at 850 degrees C and
it is burned.  This by-product is then washed down with a spray of water
to acid waste.  What has happened recently is that too much gas is
entering the burn box andthe by-product mostly silicon dioxide and maybe
some ammonium chloride and throw in a bit of oil mist from the pumps is
building up so fast we are forced to tear the burn box nearly every day
or the back pressure becomes too high.
    Which brings us to point B.  We have reserved a short window of time
every day between 6:00am and 8:00am.  This allows us to cool the burn
box and clean it.  We would really appreciate it if users could be
finished or at least in cool down by 6:00 am.
    Last point, Next week we will have 4 days of Holiday.  Users need to
be aware of burn box pressure and not run if pressure is above 3" H2O.
Thanks for your help in advance.ted



From tberg at snf.stanford.edu  Mon Nov 25 08:06:08 2002
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 25 Nov 2002 08:06:08 -0800
Subject: tube clean tomorrow
Message-ID: <3DE24A70.A3C77D06@snf.stanford.edu>

As most of you know if you have been reading the daily report, LTO will
be going down tomorrow for a pull and clean.  It might go down today
since the TC sheath and cantilever sheaths were broken .ted



From tberg at snf.stanford.edu  Mon Nov 25 09:09:47 2002
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 25 Nov 2002 09:09:47 -0800
Subject: Tube is back up for now
Message-ID: <3DE2595B.8A7B6EDD@snf.stanford.edu>

Broken sheaths were replaced it is back in pump prog.



From maurice at snf.stanford.edu  Wed Nov 27 15:41:15 2002
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Wed, 27 Nov 2002 15:41:15 -0800
Subject: LTO test result/green light
Message-ID: <3DE5581B.70575035@snf.stanford.edu>




                cen       top      bot      rig       lef        uni
center      5871   6023   5457   6164   5512   12.17%
boat1

center      6762   6969   6284   6969   6243   10.93%
boat2

center      6680   7084   6486   7143   6417   10.73%
of tube

center      6228   7337   5770   7204   5663   25.99%
boat3

center      5879   6033   5672   6319   5591   12.39%
boat4


Boats 1 and 2 are non-metal.



--
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278