From rcrane at snf.stanford.edu  Tue Oct  1 13:44:45 2002
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Tue, 01 Oct 2002 13:44:45 -0700
Subject: Silane use over the weekend
Message-ID: <3D9A093D.77D1F459@snf.stanford.edu>

Silane gas users: We are approaching the 20% remaining gas level for the
silane cylinder supplying poly, bpsg, tystar, and SiGe tubes. I am
planning to change out the cylinder on Monday, 10/7. If you are planning
to run these tubes between now and Monday, please notify me with your
deposition duration times so I can calculate gas reserves. With a flow
of 200 sccm (worst case), there should be 2,500 minutes of gas remaining
plus a buffer. What make this difficult is that all four tubes are
supplied from a common source.

We are in the process of adding an auto-change over manifold so a back
up cylinder will automatically come on line when the used cylinder
approaches empty. Until then, You and I will need to work together to
ensure an uninterrupted flow of silane.

Thanks for your help,

Dick
5-3665



From rcrane at snf.stanford.edu  Fri Oct  4 17:15:37 2002
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Fri, 04 Oct 2002 17:15:37 -0700
Subject: Low SiH4 level alert
Message-ID: <3D9E2F29.B275702F@snf.stanford.edu>

Silane/LP users,

The silane cylinder that supplies tystar, poly, bpsg, and SiGe tubes
will be changed on Monday, October 4. The quantity of gas remaining can
support 2000 minutes of 200 sccm deposition plus a safety margin. As of
now, there are no reservations for the weekend. If you do plan on
running, please reply (reply to all) to this e-mail so any other user
can compute remaining silane. Please do not run without noting gas
usage. Example: 2000 min - dep time in minutes = remaining minutes for
the next user. A spare cylinder with an automatic cylinder change-over
manifold is in the works.

Thanks and have a good weekend,

Dick



From aliagah at stanford.edu  Fri Oct  4 22:05:21 2002
From: aliagah at stanford.edu (aliagah at stanford.edu)
Date: Fri, 04 Oct 2002 22:05:21 -0700
Subject: Low SiH4 level alert
In-Reply-To: <3D9E2F29.B275702F@snf.stanford.edu>
References: <3D9E2F29.B275702F@snf.stanford.edu>
Message-ID: <1033794321.3d9e73117a75b@webmail.stanford.edu>


I have used the tylan nitride for a total time of 110 min. So 1890 min
should be left.

Ali.
 

Quoting Dick Crane <rcrane at snf.stanford.edu>:

> Silane/LP users,
> 
> The silane cylinder that supplies tystar, poly, bpsg, and SiGe tubes
> will be changed on Monday, October 4. The quantity of gas remaining
> can
> support 2000 minutes of 200 sccm deposition plus a safety margin. As
> of
> now, there are no reservations for the weekend. If you do plan on
> running, please reply (reply to all) to this e-mail so any other
> user
> can compute remaining silane. Please do not run without noting gas
> usage. Example: 2000 min - dep time in minutes = remaining minutes
> for
> the next user. A spare cylinder with an automatic cylinder
> change-over
> manifold is in the works.
> 
> Thanks and have a good weekend,
> 
> Dick
> 
> 


From chion at stanford.edu  Sat Oct  5 17:52:28 2002
From: chion at stanford.edu (Chi On Chui)
Date: Sat, 5 Oct 2002 17:52:28 -0700 (PDT)
Subject: Low SiH4 level alert
In-Reply-To: <1033794321.3d9e73117a75b@webmail.stanford.edu>
Message-ID: <Pine.GSO.4.44.0210051745590.22067-100000@saga6.Stanford.EDU>


Tylan10 (nitride) uses only DCS, not silane. I think I should start from
2000 mins.

I used 3 mins in tylan8 (sige). The remaining now should be 1997 mins.

/chi on

> I have used the tylan nitride for a total time of 110 min. So 1890 min
> should be left.
>
> Ali.
>

> > Example: 2000 min - dep time in minutes = remaining minutes
> >
> > Dick



From luscious at stanford.edu  Sat Oct  5 21:37:24 2002
From: luscious at stanford.edu (luscious at stanford.edu)
Date: Sat, 05 Oct 2002 21:37:24 -0700
Subject: Low SiH4 level alert
In-Reply-To: <Pine.GSO.4.44.0210051745590.22067-100000@saga6.Stanford.EDU>
References: <Pine.GSO.4.44.0210051745590.22067-100000@saga6.Stanford.EDU>
Message-ID: <1033879044.3d9fbe04480e4@webmail.stanford.edu>

 I used tylanbgsg. It should be 1952 minutes.



Quoting Chi On Chui <chion at Stanford.EDU>:

> 
> Tylan10 (nitride) uses only DCS, not silane. I think I should start
> from
> 2000 mins.
> 
> I used 3 mins in tylan8 (sige). The remaining now should be 1997
> mins.
> 
> /chi on
> 
> > I have used the tylan nitride for a total time of 110 min. So 1890
> min
> > should be left.
> >
> > Ali.
> >
> 
> > > Example: 2000 min - dep time in minutes = remaining minutes
> > >
> > > Dick
> 
> 


From luscious at stanford.edu  Sat Oct  5 23:10:08 2002
From: luscious at stanford.edu (luscious at stanford.edu)
Date: Sat, 05 Oct 2002 23:10:08 -0700
Subject: Low SiH4 level alert
In-Reply-To: <1033879044.3d9fbe04480e4@webmail.stanford.edu>
References: <Pine.GSO.4.44.0210051745590.22067-100000@saga6.Stanford.EDU> <1033879044.3d9fbe04480e4@webmail.stanford.edu>
Message-ID: <1033884608.3d9fd3c048083@webmail.stanford.edu>

 I used the polysilicon. The remaining time is 1872 minutes.



Quoting luscious at Stanford.EDU:

>  I used tylanbgsg. It should be 1952 minutes.
> 
> 
> 
> Quoting Chi On Chui <chion at Stanford.EDU>:
> 
> > 
> > Tylan10 (nitride) uses only DCS, not silane. I think I should
> start
> > from
> > 2000 mins.
> > 
> > I used 3 mins in tylan8 (sige). The remaining now should be 1997
> > mins.
> > 
> > /chi on
> > 
> > > I have used the tylan nitride for a total time of 110 min. So
> 1890
> > min
> > > should be left.
> > >
> > > Ali.
> > >
> > 
> > > > Example: 2000 min - dep time in minutes = remaining minutes
> > > >
> > > > Dick
> > 
> > 
> 


From mdickey at snf.stanford.edu  Mon Oct  7 07:20:26 2002
From: mdickey at snf.stanford.edu (Mike Dickey)
Date: Mon, 07 Oct 2002 07:20:26 -0700
Subject: Silane
Message-ID: <3DA1982A.CAA5E05@snf.stanford.edu>

The tubes are down for 24 hours for a Silane bottle change



From mdickey at snf.stanford.edu  Tue Oct  8 07:19:45 2002
From: mdickey at snf.stanford.edu (Mike Dickey)
Date: Tue, 08 Oct 2002 07:19:45 -0700
Subject: SILANE
Message-ID: <3DA2E981.6FBA3EF6@snf.stanford.edu>

Silane is back on line. 24 hour leak check passed



From vikas.galhotra at lightconnect.com  Tue Oct  8 21:14:03 2002
From: vikas.galhotra at lightconnect.com (Vikas Galhotra)
Date: Tue, 8 Oct 2002 21:14:03 -0700
Subject: tylanbpsg free from 9:00 pm onwards today10/08 .  wafers not ready
Message-ID: <2963ADCF008F5F4BA05BCD4B1720A96D912F3A@lcpo.lightconnect.com>

@


From ankurjn at stanford.edu  Sun Oct 13 23:54:25 2002
From: ankurjn at stanford.edu (Ankur Jain)
Date: Sun, 13 Oct 2002 23:54:25 -0700 (PDT)
Subject: problem with tylanbpsg
Message-ID: <Pine.GSO.4.44.0210132351310.18795-100000@elaine2.Stanford.EDU>

hello everyone!
 When running tylanbpsg, the process pressure becomes too high and
deposition gets aborted. I ran two trials, but none worked. Over the
weekend, people have found the deposition rate to be very low as well.
 I have reported the problem. This is FYI.

Thanks!

Ankur.


*************************************************************************
ANKUR JAIN
Graduate Student                               Residence:
Department of Mechanical Engineering           19 Comstock Circle Apt. A
Room 500-Q, Building 500                       Stanford University
Stanford University, CA-94305                  CA - 94305
Ph: 1-650-723-8589                             Ph: 1-650-497-1784
Alternate email : ankurjain_nd at yahoo.com



From tberg at snf.stanford.edu  Tue Oct 15 06:53:57 2002
From: tberg at snf.stanford.edu (Ted Berg)
Date: Tue, 15 Oct 2002 06:53:57 -0700
Subject: Issues with LTO
Message-ID: <3DAC1DF5.D0F183A5@snf.stanford.edu>

Greetings all,
     As most of you know we hav had reports of low dep rates and high
pressure on the tube recently.  In looking at the log or coral comments
related to these incidents are very sparse.  We in maintenace are good,
but not psychic.please give us as many details as possible via coral or
email to help us find the problems as quickly as possible.  Parameters
such as pressure, temp, gas flows are the main variables in LTO dep so
these would be very helpful.  Also be aware that on variable parameter
recipes it is easy to make a mistake that could drastically affect
outcomes.  Since wehave no history on the runs the investigation of
issues is much more difficult.  Thanks in advance for your help and
sorry for whining.ted



From rajesh at t-ram.com  Wed Oct 16 09:50:44 2002
From: rajesh at t-ram.com (Rajesh Gupta)
Date: Wed, 16 Oct 2002 09:50:44 -0700
Subject: Removed my reservation
Message-ID: <09D9A35A159F1840B6B70EAD4E681A1D17C269@gate.t-ram.com>

Hello All
 
removed my reservation from tylanbpsg from 10:00am today. 
 
rajesh

	 


From tberg at snf.stanford.edu  Fri Oct 18 08:09:50 2002
From: tberg at snf.stanford.edu (Ted Berg)
Date: Fri, 18 Oct 2002 08:09:50 -0700
Subject: high pressure
Message-ID: <3DB0243E.E70F973@snf.stanford.edu>

hello all, we checked out the system this morning and found the pump
screen clogged again. it was changed and tested at process flows:
o2-115, siH4-100 pressure at 297 which is normal.  please advise if you
have any further problems.  also be aware that thickness is at 25+
microns clean is scheduled for 30 so probably next week.ted



From ankurjn at stanford.edu  Fri Oct 18 08:26:41 2002
From: ankurjn at stanford.edu (Ankur Jain)
Date: Fri, 18 Oct 2002 08:26:41 -0700 (PDT)
Subject: high pressure
In-Reply-To: <3DB0243E.E70F973@snf.stanford.edu>
Message-ID: <Pine.GSO.4.44.0210180824400.3312-100000@elaine1.Stanford.EDU>

Hello everyone!
 I have a request to make to labmembers who will be using tylanbpsg in the
next few days. It would be nice if they could post to this list the
pressures they get in their runs.

Thanks!

Ankur.


 On Fri, 18 Oct 2002, Ted Berg wrote:

> hello all, we checked out the system this morning and found the pump
> screen clogged again. it was changed and tested at process flows:
> o2-115, siH4-100 pressure at 297 which is normal.  please advise if you
> have any further problems.  also be aware that thickness is at 25+
> microns clean is scheduled for 30 so probably next week.ted
>



From yapeter at stanford.edu  Sat Oct 19 16:01:44 2002
From: yapeter at stanford.edu (Yves-Alain Peter)
Date: Sat, 19 Oct 2002 16:01:44 -0700
Subject: successfull run record
References: <Pine.GSO.4.44.0210180824400.3312-100000@elaine1.Stanford.EDU>
Message-ID: <3DB1E458.D2246337@stanford.edu>

As per your request, please, find below details of today's successfull run:

PSG400
20min
SiH4: 14
PH3: 86
O2: 115
Temp: 400
Pressure: 326
thickness: around 2000A

Yves-Alain


Ankur Jain wrote:

> Hello everyone!
>  I have a request to make to labmembers who will be using tylanbpsg in the
> next few days. It would be nice if they could post to this list the
> pressures they get in their runs.
>
> Thanks!
>
> Ankur.
>
>  On Fri, 18 Oct 2002, Ted Berg wrote:
>
> > hello all, we checked out the system this morning and found the pump
> > screen clogged again. it was changed and tested at process flows:
> > o2-115, siH4-100 pressure at 297 which is normal.  please advise if you
> > have any further problems.  also be aware that thickness is at 25+
> > microns clean is scheduled for 30 so probably next week.ted
> >
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From yoshh at stanford.edu  Sat Oct 19 16:09:52 2002
From: yoshh at stanford.edu (Yoshikazu Hishinuma)
Date: Sat, 19 Oct 2002 16:09:52 -0700
Subject: LTO
References: <Pine.GSO.4.44.0210180824400.3312-100000@elaine1.Stanford.EDU> <3DB1E458.D2246337@stanford.edu>
Message-ID: <000e01c277c4$a19d6f60$f26a40ab@yoshh>

I also run LTO400 yesterday successfully.

LTO400
30min
pressure 314
thickness 7400-8000A

-Yoshi Hishinuma

> As per your request, please, find below details of today's successfull
run:
>
> PSG400
> 20min
> SiH4: 14
> PH3: 86
> O2: 115
> Temp: 400
> Pressure: 326
> thickness: around 2000A
>
> Yves-Alain
>
>
> Ankur Jain wrote:
>
> > Hello everyone!
> >  I have a request to make to labmembers who will be using tylanbpsg in
the
> > next few days. It would be nice if they could post to this list the
> > pressures they get in their runs.
> >
> > Thanks!
> >
> > Ankur.
> >
> >  On Fri, 18 Oct 2002, Ted Berg wrote:
> >
> > > hello all, we checked out the system this morning and found the pump
> > > screen clogged again. it was changed and tested at process flows:
> > > o2-115, siH4-100 pressure at 297 which is normal.  please advise if
you
> > > have any further problems.  also be aware that thickness is at 25+
> > > microns clean is scheduled for 30 so probably next week.ted
> > >
>



From tberg at snf.stanford.edu  Mon Oct 21 06:41:26 2002
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 21 Oct 2002 06:41:26 -0700
Subject: LTO Shutdown
Message-ID: <3DB40406.2332D655@snf.stanford.edu>

 Sorry  to Barbara who has reservations, but bpsg is past the limit for
cleaning so we have taken it down.



From rcrane at snf.stanford.edu  Thu Oct 24 12:08:17 2002
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Thu, 24 Oct 2002 12:08:17 -0700
Subject: Burnbox cleaning
Message-ID: <3DB84521.A570D6A8@snf.stanford.edu>

LPCVD users:

In an effort to minimize unscheduled downtime, I am scheduling a two
hour PM for Mondays, Wednesdays and Fridays from 0600 through 0800, to
allow for routine burn box cleaning. The PM schedule will commence
Monday, 10/28/02. This PM program will minimize the randomness of the
cleans to permit better scheduling for users. If the scheduled day is a
holiday, then the cleaning will be rescheduled to to the preceding or
following day

How is this different from our present method? Currently the burn box
back pressure is monitored and logged daily. If pressure become
positive, the burn box is cleaned as soon as there is a coincidental
time opening in all the LPCVD tubes. Sometimes this is difficult to
achieve without inconveniencing someone. In general, the box is cleaned
Monday and Friday mornings and as required during the week. If there are
thick nitride and/or LTO depositions, the box loads up more quickly with
the cleanings becoming more random. The PM schedule will improve up
time.

Thanks,

Dick