Low SiH4 level alert

luscious at stanford.edu luscious at stanford.edu
Sat Oct 5 23:10:08 PDT 2002


 I used the polysilicon. The remaining time is 1872 minutes.



Quoting luscious at Stanford.EDU:

>  I used tylanbgsg. It should be 1952 minutes.
> 
> 
> 
> Quoting Chi On Chui <chion at Stanford.EDU>:
> 
> > 
> > Tylan10 (nitride) uses only DCS, not silane. I think I should
> start
> > from
> > 2000 mins.
> > 
> > I used 3 mins in tylan8 (sige). The remaining now should be 1997
> > mins.
> > 
> > /chi on
> > 
> > > I have used the tylan nitride for a total time of 110 min. So
> 1890
> > min
> > > should be left.
> > >
> > > Ali.
> > >
> > 
> > > > Example: 2000 min - dep time in minutes = remaining minutes
> > > >
> > > > Dick
> > 
> > 
> 



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