problem with tylanbpsg

Ankur Jain ankurjn at
Sun Oct 13 23:54:25 PDT 2002

hello everyone!
 When running tylanbpsg, the process pressure becomes too high and
deposition gets aborted. I ran two trials, but none worked. Over the
weekend, people have found the deposition rate to be very low as well.
 I have reported the problem. This is FYI.



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