high pressure

Ted Berg tberg at snf.stanford.edu
Fri Oct 18 08:09:50 PDT 2002


hello all, we checked out the system this morning and found the pump
screen clogged again. it was changed and tested at process flows:
o2-115, siH4-100 pressure at 297 which is normal.  please advise if you
have any further problems.  also be aware that thickness is at 25+
microns clean is scheduled for 30 so probably next week.ted




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