high pressure

Ankur Jain ankurjn at stanford.edu
Fri Oct 18 08:26:41 PDT 2002


Hello everyone!
 I have a request to make to labmembers who will be using tylanbpsg in the
next few days. It would be nice if they could post to this list the
pressures they get in their runs.

Thanks!

Ankur.


 On Fri, 18 Oct 2002, Ted Berg wrote:

> hello all, we checked out the system this morning and found the pump
> screen clogged again. it was changed and tested at process flows:
> o2-115, siH4-100 pressure at 297 which is normal.  please advise if you
> have any further problems.  also be aware that thickness is at 25+
> microns clean is scheduled for 30 so probably next week.ted
>




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