successfull run record

Yves-Alain Peter yapeter at stanford.edu
Sat Oct 19 16:01:44 PDT 2002


As per your request, please, find below details of today's successfull run:

PSG400
20min
SiH4: 14
PH3: 86
O2: 115
Temp: 400
Pressure: 326
thickness: around 2000A

Yves-Alain


Ankur Jain wrote:

> Hello everyone!
>  I have a request to make to labmembers who will be using tylanbpsg in the
> next few days. It would be nice if they could post to this list the
> pressures they get in their runs.
>
> Thanks!
>
> Ankur.
>
>  On Fri, 18 Oct 2002, Ted Berg wrote:
>
> > hello all, we checked out the system this morning and found the pump
> > screen clogged again. it was changed and tested at process flows:
> > o2-115, siH4-100 pressure at 297 which is normal.  please advise if you
> > have any further problems.  also be aware that thickness is at 25+
> > microns clean is scheduled for 30 so probably next week.ted
> >
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