LTO

Yoshikazu Hishinuma yoshh at stanford.edu
Sat Oct 19 16:09:52 PDT 2002


I also run LTO400 yesterday successfully.

LTO400
30min
pressure 314
thickness 7400-8000A

-Yoshi Hishinuma

> As per your request, please, find below details of today's successfull
run:
>
> PSG400
> 20min
> SiH4: 14
> PH3: 86
> O2: 115
> Temp: 400
> Pressure: 326
> thickness: around 2000A
>
> Yves-Alain
>
>
> Ankur Jain wrote:
>
> > Hello everyone!
> >  I have a request to make to labmembers who will be using tylanbpsg in
the
> > next few days. It would be nice if they could post to this list the
> > pressures they get in their runs.
> >
> > Thanks!
> >
> > Ankur.
> >
> >  On Fri, 18 Oct 2002, Ted Berg wrote:
> >
> > > hello all, we checked out the system this morning and found the pump
> > > screen clogged again. it was changed and tested at process flows:
> > > o2-115, siH4-100 pressure at 297 which is normal.  please advise if
you
> > > have any further problems.  also be aware that thickness is at 25+
> > > microns clean is scheduled for 30 so probably next week.ted
> > >
>




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