From xiangli at stanford.edu  Wed Aug  6 17:32:04 2003
From: xiangli at stanford.edu (Xiang Li)
Date: Wed, 06 Aug 2003 17:32:04 -0700
Subject: The reservation from 7pm to 10pm is cancelled
Message-ID: <5.2.0.9.2.20030806173015.038b9d28@xiangli.pobox.stanford.edu>





From iwjung at stanford.edu  Fri Aug  8 15:40:40 2003
From: iwjung at stanford.edu (Il Woong Jung)
Date: Fri, 8 Aug 2003 15:40:40 -0700
Subject: Doping poly
Message-ID: <NHBBKHKLILLNOJOBOKOOAEIGCCAA.iwjung@stanford.edu>

Hi all,

I was wondering how people were doping their poly since the psg programs aren't back up on the LTO furnace.


Il Woong Jung
--------------------------
E.L. Ginzton Labs 41C
Stanford, CA 94305
E-mail: iwjung at stanford.edu
Phone: 650-723-1992(6104)
Fax: 650-725-7509
--------------------------



From chion at stanford.edu  Fri Aug  8 18:37:15 2003
From: chion at stanford.edu (Chi On Chui)
Date: Fri, 8 Aug 2003 18:37:15 -0700 (PDT)
Subject: Doping poly
In-Reply-To: <NHBBKHKLILLNOJOBOKOOAEIGCCAA.iwjung@stanford.edu>
Message-ID: <Pine.GSO.4.44.0308081835390.26674-100000@elaine7.Stanford.EDU>

II Woong,

You are talking about doping poly-Si not doping SiO2 right?
If so, it could be done in tystar furnace.

/Chi On

> I was wondering how people were doping their poly since the psg programs
> aren't back up on the LTO furnace.
>
>
> Il Woong Jung



From maurice at snf.stanford.edu  Fri Aug 15 10:55:06 2003
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Fri, 15 Aug 2003 10:55:06 -0700
Subject: Training cancelled tube free til 2:30
Message-ID: <3F3D1E7A.805963@snf.stanford.edu>





From maurice at snf.stanford.edu  Mon Aug 18 14:54:27 2003
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Mon, 18 Aug 2003 14:54:27 -0700
Subject: LTO free until 10:30 tonight
Message-ID: <3F414B13.43C40D47@snf.stanford.edu>

Training finished early



From mdickey at snf.stanford.edu  Tue Aug 19 06:53:11 2003
From: mdickey at snf.stanford.edu (Mike Dickey)
Date: Tue, 19 Aug 2003 06:53:11 -0700
Subject: Pull and clean
Message-ID: <3F422BC7.2C0D3181@snf.stanford.edu>

The LTO tube is going down for a pull and clean on thursday and friday.
Please plan accordingly.



From MAILER-DAEMON at securegate.antivirus.saint-gobain.co.in  Tue Aug 19 21:52:02 2003
From: MAILER-DAEMON at securegate.antivirus.saint-gobain.co.in (Mail Delivery Subsystem)
Date: Wed, 20 Aug 2003 10:22:02 +0530
Subject: Returned mail: see transcript for details
Message-ID: <200308200452.h7K4gqp03054@securegate.antivirus.saint-gobain.co.in>

The original message was received at Wed, 20 Aug 2003 10:09:10 +0530
from uucp at localhost

   ----- The following addresses had permanent fatal errors -----
challenging.careers at sggiworks.saint-gobain.co.in

   ----- Transcript of session follows -----

ANTIVIRUS SYSTEM FOUND VIRUSES

From: <tylanbpsg at snf.stanford.edu>
Subject: Re: Details

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This message contains viruses as has been detected by our
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Please clean the virus and resend the file.

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From maurice at snf.stanford.edu  Wed Aug 20 11:07:26 2003
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Wed, 20 Aug 2003 11:07:26 -0700
Subject: PSG400 
Message-ID: <3F43B8DE.7A81F33@snf.stanford.edu>

Hello PSG400 users.

The program is back on the LTO disk.  We had removed it while we were
testing the doping levels and etchrates after the gas flows were
calibrated.


To get a 4% doping, input the following flows in the program.
SiH4=60
PH3=62

For an 8% doping, input the following flows in the program.
SiH4=22
PH3=86

We will send out the etch rate data soon.



From kailash at stanford.edu  Wed Aug 20 17:50:50 2003
From: kailash at stanford.edu (Kailash)
Date: Wed, 20 Aug 2003 17:50:50 -0700
Subject: Releasing reservation for tonight 9:30 pm - 12 
Message-ID: <000e01c3677e$4491ec60$376340ab@EPHEMERAL>

Wafers are not ready. Sorry for the late notice.

- Kailash

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