Doping poly

Chi On Chui chion at stanford.edu
Fri Aug 8 18:37:15 PDT 2003


II Woong,

You are talking about doping poly-Si not doping SiO2 right?
If so, it could be done in tystar furnace.

/Chi On

> I was wondering how people were doping their poly since the psg programs
> aren't back up on the LTO furnace.
>
>
> Il Woong Jung




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