PSG400

Maurice Stevens maurice at snf.stanford.edu
Wed Aug 20 11:07:26 PDT 2003


Hello PSG400 users.

The program is back on the LTO disk.  We had removed it while we were
testing the doping levels and etchrates after the gas flows were
calibrated.


To get a 4% doping, input the following flows in the program.
SiH4=60
PH3=62

For an 8% doping, input the following flows in the program.
SiH4=22
PH3=86

We will send out the etch rate data soon.




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