Hello PSG400 users. The program is back on the LTO disk. We had removed it while we were testing the doping levels and etchrates after the gas flows were calibrated. To get a 4% doping, input the following flows in the program. SiH4=60 PH3=62 For an 8% doping, input the following flows in the program. SiH4=22 PH3=86 We will send out the etch rate data soon.