Thin LTO

Alan Hsiung hsiung at snf.stanford.edu
Tue Jun 3 16:29:33 PDT 2003


Hi Folks,
    I am just wondering if anybody has the experience to deposit as thin as
200A LTO.
    If so, how kind of condition have you ever tried? How is the result?
Uniformity and etc.
    I have been struggling to deposit such a thin LTO using LTO450P recipe,
but no much luck.
    Any advice will be greatly appreciated.

Alan

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