hsiung at snf.stanford.edu
Tue Jun 3 16:29:33 PDT 2003
I am just wondering if anybody has the experience to deposit as thin as
If so, how kind of condition have you ever tried? How is the result?
Uniformity and etc.
I have been struggling to deposit such a thin LTO using LTO450P recipe,
but no much luck.
Any advice will be greatly appreciated.
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