From jawad at nova.Stanford.EDU Thu Mar 6 07:47:16 2003 From: jawad at nova.Stanford.EDU (Jawad Nasrullah) Date: Thu, 6 Mar 2003 07:47:16 -0800 (PST) Subject: reservation cancelled 4-9pm today Message-ID: reservation cancelled 4-9pm today. From rcrane at snf.stanford.edu Mon Mar 10 16:01:37 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 10 Mar 2003 16:01:37 -0800 Subject: Furnace shut down for Thermco tie-in Message-ID: <3E6D2761.C9709463@snf.stanford.edu> LP furnace users, Heads up for a future shut down. The good news: The long awaited process gas tie-in for the Thermco, bank 1 source cabinet is finally upon us. The bad news: The tie-in and permit required testing will necessitate a 10-14 day shut down of SiGe, Poly, Nitride, BPSG, and Tystar. We will attempt to reduce this time duration. The earliest start date for the tie-in would April 7, 2003. The permit issues are still being resolved, so the actual start time may be later. I will post a definite start date as soon as it is known. Please starting planning for this shut down. Furnaces NOT affected by this action: BBr3, POCl3, oxidation (tylan1-4,7), FGA, and TEOS. Thanks for your patience, Dick -------------- next part -------------- An HTML attachment was scrubbed... URL: From grupp at snowmass.Stanford.EDU Mon Mar 10 16:15:21 2003 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Mon, 10 Mar 2003 16:15:21 -0800 (PST) Subject: removed res LTO 1600-2230 Message-ID: pardon last minute! --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From tberg at snf.stanford.edu Tue Mar 11 07:49:43 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 11 Mar 2003 07:49:43 -0800 Subject: Lonh378 Problem Message-ID: <3E6E0597.7BE5ADE7@snf.stanford.edu> Sorry to say that Sean Hansen had problems with LONH378 last night. Unfortunately there is no info on what the alarm was or what happened to the process. Good argument for a monitoring system. In investigating this problem this morning i found that the Lo NH3 has a problem and is flowing about 5% high(17 sccm vs. 13.5 for set point) this is enough to cause the MFS460 alarmand the gas to shut off. If the run continues to completion the result will be a very silicon rich nitride with a refractive index approaching that of poly approximately 3.0 which is exactly what happened if the DCS was off or low the opposite would be the case. Now for the solution. we are removing the MFC and will be replacing it as sonn as this one is repaired/recaled or replaced. In the mean time if folks want to run a recipe similar to lonh378 the recipe will have to be rewritten using the higher ammonia MFC. Sorry for the problem but we are on it. ted From grupp at snowmass.Stanford.EDU Wed Mar 12 16:08:09 2003 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Wed, 12 Mar 2003 16:08:09 -0800 (PST) Subject: LTO res cancelled Th 1000-1600 (a good one!) Message-ID: --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From rcrane at snf.stanford.edu Thu Mar 13 12:13:00 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Thu, 13 Mar 2003 12:13:00 -0800 Subject: silane cylinder change 3/19 Message-ID: <3E70E64C.44F78A70@snf.stanford.edu> LPCVD silane users, The silane supply cylinder is approaching its change-out limit. The change-out will occur at 0700 on 3/19 followed by the mandated, 24 hr. leak test. Good news, I am told the permit for the auto change-over plumbing has been issued. Once installed, cylinder change-outs will not interrupt normal furnace use. Thanks and sorry for any inconvenience, Dick From jawad at nova.Stanford.EDU Sat Mar 15 18:45:39 2003 From: jawad at nova.Stanford.EDU (Jawad Nasrullah) Date: Sat, 15 Mar 2003 18:45:39 -0800 (PST) Subject: reservation calncelled Sunday 8am-3pm Message-ID: reservation calncelled Sunday 8am-3pm From bchui at california.com Tue Mar 18 00:15:15 2003 From: bchui at california.com (Benjamin Chui) Date: Tue, 18 Mar 2003 00:15:15 -0800 Subject: Tylanbpsg available tues 1700-2100 Message-ID: I took advantage of a 5-hour reservation Monday night whose owner failed to show up for, and got my run in. From rcrane at snf.stanford.edu Fri Mar 28 17:38:02 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Fri, 28 Mar 2003 17:38:02 -0800 Subject: 4/21 Furnace shutdown for Thermco tie-in Message-ID: <3E84F8FA.4C28B49A@snf.stanford.edu> LP furnace users, The LPCVD furnace shutdown is now on schedule to start at 0600 on Monday, April 21, with a completion date of Wednesday, April 30. This action allows final connection of process gases to the Thermco, bank 1 furnace and will affect SiGe, Poly, Nitride, BPSG, and Tystar tubes. Please plan according. The permits are now in order, contractors have committed, staff is ready and county inspectors are being scheduled. The tie-in and permit required testing should take seven working days. There is a small amount of buffer time built in to this schedule. The issue of county inspections is still being resolved and has the highest change of delay. All work which could be addressed prior to shutdown has been completed. I will issue progress reports as milestones are completed. Furnaces NOT affected by this action: BBr3, POCl3, oxidation (tylan1-4,7), FGA, and TEOS. Thanks for your patience and understanding. This work represents a major step toward six inch processing capability. Dick -------------- next part -------------- An HTML attachment was scrubbed... URL: