cleaning dummy wafers

bob hou managerbcm02 at yahoo.com
Wed May 14 16:22:25 PDT 2003


Hi Junghwa:
Last time I refilled the boats of no metal after I
stripped of the dummies. I think the uncleaned dummies
is for metals, we have four cassates of that. Last
time I cleaned my two cassates very clean. ^_^
Bob
--- junghwa at stanford.edu wrote:
> I was replacing dummy wafers this morning,
> and there were not enough clean dummies.
> And even those clean ones still had oxide left at
> the bottom half of
> wafer.
> If you replace dummies, please clean them all, and
> cleam them well.


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