1st 2 slots from the middle...

jules83 at stanford.edu jules83 at stanford.edu
Fri May 16 23:01:13 PDT 2003


I am sorry, I put two wafers with TiN on them in the first two slots in
the "NON-METAL" boat. Those two slots are now considered
metal-contaminated. I am sorry if this will impact anyone's work.

Sorry again!

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