unstripped dummy wafers

Il Woong Jung iwjung at stanford.edu
Tue Feb 10 10:20:00 PST 2004


This Sunday, I found that almost all of the non-metal dummy wafers
to replace the dummies in the tube have not been completely stripped.
Please look at the wafers after the strip and make sure there is no oxide.
And take the time to put it back in the BOE if not, please. 


Il Woong Jung
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E.L. Ginzton Labs 41C
Stanford, CA 94305
E-mail: iwjung at stanford.edu
Phone: 650-723-1992(6104)
Fax: 650-725-7509
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