From maurice at snf.stanford.edu Wed Jan 7 10:08:54 2004 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Wed, 07 Jan 2004 10:08:54 -0800 Subject: Phos bottle change on 1/12/04 Message-ID: <3FFC4B36.200@snf.stanford.edu> LTO and Tystar users, The Phosphine bottle is going to be changed monday morning (1/12/04). Both tube can still be used, but only for undoped depositions. Both tubes will show yellow on Coral. We expect that the bottle change will take 24 hours. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From iwjung at stanford.edu Wed Jan 7 23:15:07 2004 From: iwjung at stanford.edu (Il Woong Jung) Date: Wed, 7 Jan 2004 23:15:07 -0800 Subject: reservation cancelled Thursday 1000-1400 Message-ID: Il Woong Jung -------------------------- E.L. Ginzton Labs 41C Stanford, CA 94305 E-mail: iwjung at stanford.edu Phone: 650-723-1992(6104) Fax: 650-725-7509 -------------------------- From mdickey at snf.stanford.edu Tue Jan 13 07:58:46 2004 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Tue, 13 Jan 2004 07:58:46 -0800 Subject: Gas back on Message-ID: <400415B6.766264AB@snf.stanford.edu> The 15%Phosphine/Silane is back on line. From chion at stanford.edu Sat Jan 31 22:29:52 2004 From: chion at stanford.edu (Chi On Chui) Date: Sat, 31 Jan 2004 22:29:52 -0800 (PST) Subject: Practices of changing dummies Message-ID: Dear LTO users, When I was about to use LTO today, I noticed two very unacceptable practices. The first one was failure to update the log book, which would have indicated a dummy wafer thickness of 3.84um. The last user requested a 1um deposition on top of 2.84um. S/he should be responsible for BOTH changing the dummies and stripping the oxides. Since I had to use the tube today, so I was happy to be penalized with my own processing time to do the jobs. Secondly, when I were going to replace dummies with those "cleaned" ones inside the rollaround car, I noticed that all the dummies (both metal & non-metal) there were so colorful. The last-but-one dummy-changer should have left the job to the next person. Ah...maybe that's the reason why the user before me didn't want to do that in addition to her/his. Again, I did just enuff for my run!!! How should we continue to enforce the "LTO protocol" from now on? /Chi On