From erhan.ata at gmems.com Thu Nov 11 00:34:52 2004 From: erhan.ata at gmems.com (Erhan Ata) Date: Thu, 11 Nov 2004 00:34:52 -0800 (PST) Subject: Film Stress studies Message-ID: <20041111083453.55578.qmail@web50207.mail.yahoo.com> Hello, did anyone studied stress and quality (roughness, defects et.) of LTO and doped/undoped poly films from furnaces tylanbpsg and tystar. My main concern is about stress since I'm releasing quite large mebranes with these films as underlying/sacrifical layers. I would appreciate any recommendation about these processes, including references, with regards to stress and quality. With regards Erhan Ata ===== From bipin at stanford.edu Thu Nov 18 09:08:28 2004 From: bipin at stanford.edu (Bipin Rajendran) Date: Thu, 18 Nov 2004 09:08:28 -0800 Subject: free from 2 PM, 11/18 Message-ID: <01aa01c4cd91$399ed8c0$f86040ab@supernova> An HTML attachment was scrubbed... URL: From okilic at stanford.edu Thu Nov 18 10:12:20 2004 From: okilic at stanford.edu (Onur Kilic) Date: Thu, 18 Nov 2004 10:12:20 -0800 Subject: grabbed 2 PM 11/18, released 10:30AM 11/20 Message-ID: <1100801540.419ce6049c511@webmail.stanford.edu> grabbed reservation for 2 PM 11/18 that was released , and released 10:30AM 11/20. From aflannery at invensense.com Thu Nov 18 13:17:09 2004 From: aflannery at invensense.com (Anthony Flannery) Date: Thu, 18 Nov 2004 13:17:09 -0800 Subject: Piggyback Message-ID: Hi All, We need a non-critical deposition of LTO and the tube is booked through Sunday. Would anyone doing a run in the neighboorhood of 600 nm at 400 C be willing to let us piggyback. Thanks, Tony Anthony F. Flannery Jr. Director of Development MEMS Gyroscope Invensense, Inc. 2900 Gordon Ave., Suite 203 Santa Clara, CA 95051 Tel: 408-720-8482 ext. 203 Cell: 408-515-4026 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at snf.stanford.edu Thu Nov 18 15:20:00 2004 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Thu, 18 Nov 2004 15:20:00 -0800 Subject: 20 new non-metal dummies Message-ID: <419D2E20.8050006@snf.stanford.edu> -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at snf.stanford.edu Mon Nov 22 16:40:42 2004 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Mon, 22 Nov 2004 16:40:42 -0800 Subject: pull and clean complete Message-ID: <41A2870A.9050001@snf.stanford.edu> From hsanda at stanford.edu Tue Nov 30 11:33:07 2004 From: hsanda at stanford.edu (Hiroyuki Sanda) Date: Tue, 30 Nov 2004 11:33:07 -0800 Subject: reservation cacelled 15:00-20:00 today Message-ID: <1101843187.41accaf338b5b@webmail.stanford.edu> sample is not ready