Film Stress studies

Erhan Ata erhan.ata at gmems.com
Thu Nov 11 00:34:52 PST 2004


Hello,
did anyone studied stress and quality (roughness,
defects et.) of LTO and doped/undoped poly films from
furnaces tylanbpsg and tystar. 

My main concern is about stress since I'm releasing
quite large mebranes with these films as
underlying/sacrifical layers. 

I would appreciate any recommendation about these
processes, including references, with regards to
stress and quality.

With regards
Erhan Ata

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