Film Stress studies
erhan.ata at gmems.com
Thu Nov 11 00:34:52 PST 2004
did anyone studied stress and quality (roughness,
defects et.) of LTO and doped/undoped poly films from
furnaces tylanbpsg and tystar.
My main concern is about stress since I'm releasing
quite large mebranes with these films as
I would appreciate any recommendation about these
processes, including references, with regards to
stress and quality.
More information about the tylanbpsg