tylanbpsg problem

Arif Sanli Ergun sanli at stanford.edu
Thu Mar 10 20:58:03 PST 2005


I couldn't run Pump11. The alarm goes off at step15 and the program
ends. I think it is not passing the leak check. I had checked the proces
pressure during my run approximately 20 minutes into the deposition. It was
OK. The deposition time was 42 minutes. I don't know if anything happened
later.




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