From maurice at stanford.edu Wed Jan 18 09:36:02 2006 From: maurice at stanford.edu (Maurice Stevens) Date: Wed, 18 Jan 2006 09:36:02 -0800 Subject: free tomorrow 13:30-17:30 Message-ID: <43CE7C82.9090808@stanford.edu> Training cancelled -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From bipin at stanford.edu Mon Jan 23 09:18:14 2006 From: bipin at stanford.edu (Bipin Rajendran) Date: Mon, 23 Jan 2006 09:18:14 -0800 Subject: Resv for morning cancelled Message-ID: <001401c62040$fee7fcd0$f96040ab@supernova> Sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Tue Jan 31 17:34:56 2006 From: maurice at stanford.edu (Maurice Stevens) Date: Tue, 31 Jan 2006 17:34:56 -0800 Subject: New LTO boats Message-ID: <43E01040.30600@stanford.edu> Good news or Bad news The LTO tube currently has two new boats that have replaced the one long boat. The front boat ( the right one when loading wafers) is for non-metal. The rear boat (the left one as you load wafers) is for standard metal processing. These new boats hold 13 wafers each. You should run full boats as we did with the previous long boat. The first couple and the last couple of wafers will see a different gas flow than the wafers in the middle of the boat, so load your wafers toward the middle. The oxide deposition rate for undoped oxide in the tube has not changed (we have not run a doped run yet). But the uniformity on a wafer is much better . In the past uniformity across a wafer was normally 8 to 15%. The first test run with the new boats was ~2.25%. Good stuff. What if you have more than 13 metal or non-metal wafers? We should have an answer tomorrow for that. The first step was to see if this would give you a better process. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278