From bongsang at stanford.edu  Wed Apr  4 18:49:30 2007
From: bongsang at stanford.edu (Bongsang Kim)
Date: Wed, 4 Apr 2007 18:49:30 -0700
Subject: [tylanbpsg] removed reservation from 10am-2pm 04/05 morning
Message-ID: <74f115fb0704041849s657ce72bm91bcc10ba79ca9b1@mail.gmail.com>

wafers not ready.
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From vipinav at stanford.edu  Mon Apr 30 12:05:54 2007
From: vipinav at stanford.edu (vipinav at stanford.edu)
Date: Mon, 30 Apr 2007 12:05:54 -0700
Subject: Bad dep rate
Message-ID: <20070430120554.1p98d5b1k9ce8gss@webmail.stanford.edu>

Hi all

The tylanbpsg has been giving very poor results since last week. I  
tried two runs of 1 hour and 2 hour duration today morning. The  
deposition rate is as low as 1000 A/hr and varies across the length of  
the boat by upto 30%.

thanks
vipin