From khanh at t-ram.com  Sun Jan 14 21:32:28 2007
From: khanh at t-ram.com (Khanh Nguyen)
Date: Sun, 14 Jan 2007 21:32:28 -0800
Subject: Tylanbpsg status
Message-ID: <40F9C31A3EE27D459370EFA2DD3194EA0FE2C3@exchange1.t-ram.com>

Hi all,
 
I saw on the coral about tylanbpsg's pressure problem.
Does anybody know if the LTO is O.K. to run now?
Thanks.
 
Best,
 
Khanh Nguyen
408-807-8758

From gyama at snf.stanford.edu  Wed Jan 17 09:30:39 2007
From: gyama at snf.stanford.edu (Gary Yama (SNF))
Date: Wed, 17 Jan 2007 09:30:39 -0800
Subject: wafers not ready, 8:30-12:30pm free today, sorry for the late notice
Message-ID: <45AE5D3F.4060106@snf.stanford.edu>




From maurice at stanford.edu  Wed Jan 17 17:52:52 2007
From: maurice at stanford.edu (maurice stevens)
Date: Wed, 17 Jan 2007 17:52:52 -0800
Subject: Tube pull monday/Uniformity
Message-ID: <45AED2F4.7060007@stanford.edu>

Our non-uniformity issues maybe an injector issue.  We will replace the 
injectors and the tube Monday.  Monday is the soonest we can do it 
without removing user reservations.

Plan your processing accordingly.

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From hweiyin at stanford.edu  Fri Jan 19 12:43:20 2007
From: hweiyin at stanford.edu (Serene Koh)
Date: Fri, 19 Jan 2007 12:43:20 -0800 (PST)
Subject: Reservation cancelled: free after 6pm today
Message-ID: <Pine.GSO.4.44.0701191243000.22740-100000@elaine31.Stanford.EDU>


Critical process, so waiting until after tube is replaced.




From robinhmb at yahoo.com  Fri Jan 19 17:42:44 2007
From: robinhmb at yahoo.com (Robin King)
Date: Fri, 19 Jan 2007 17:42:44 -0800 (PST)
Subject: LTO tube is free Friday night
Message-ID: <181955.84789.qm@web58714.mail.re1.yahoo.com>

Hi, we're out early as someone else cancelled before us.
LTO is currently free to use.


 
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From maurice at stanford.edu  Wed Jan 24 10:59:00 2007
From: maurice at stanford.edu (Maurice M Stevens)
Date: Wed, 24 Jan 2007 10:59:00 -0800
Subject: Test results after tube pull
Message-ID: <1169665140.45b7ac74379c6@webmail.stanford.edu>

non metal boat  (26 wafers loaded)
slot #3 c=1850 t=1992 b=1985 r=2125 L=2111
slot#11 c=1741 t=1866b=1801 r=1878 L=1894
slot#24 c=1782 t=1941 b=1763 r=1994 L=1858

metal boat       (26 wafers loaded)
#11 c=1672 t=1655 b=1813 r=1715 L=1818
#12 c=1669 t=1678 b=1780 r=1719 L=1761
#13 c=1680 t=1756 b=1789 r=1741 L=1825
#14 c=996 t=671 b=1624 r=1044 L=1398
#15 c=12443 t=2643 b=2100 r=2336 L=2608

Wafers 14 and 15 of rear boat were very non-uniform...looks like 14 was not
sitting straight.
All other test wafers look normal.  We will run another test on the rear
boat soon (tube is booked up).




From hweiyin at stanford.edu  Fri Jan 26 12:07:48 2007
From: hweiyin at stanford.edu (Serene Koh)
Date: Fri, 26 Jan 2007 12:07:48 -0800 (PST)
Subject: Reservation today cancelled 2.30pm-8.30pm
Message-ID: <Pine.LNX.4.44.0701261205410.25574-100000@hedge18.Stanford.EDU>


Sorry for the late notice. Had problems with Ag4100, so could not proceed
with run.