Test results after tube pull
Maurice M Stevens
maurice at stanford.edu
Wed Jan 24 10:59:00 PST 2007
non metal boat (26 wafers loaded)
slot #3 c=1850 t=1992 b=1985 r=2125 L=2111
slot#11 c=1741 t=1866b=1801 r=1878 L=1894
slot#24 c=1782 t=1941 b=1763 r=1994 L=1858
metal boat (26 wafers loaded)
#11 c=1672 t=1655 b=1813 r=1715 L=1818
#12 c=1669 t=1678 b=1780 r=1719 L=1761
#13 c=1680 t=1756 b=1789 r=1741 L=1825
#14 c=996 t=671 b=1624 r=1044 L=1398
#15 c=12443 t=2643 b=2100 r=2336 L=2608
Wafers 14 and 15 of rear boat were very non-uniform...looks like 14 was not
sitting straight.
All other test wafers look normal. We will run another test on the rear
boat soon (tube is booked up).
More information about the tylanbpsg
mailing list