Running LTO400 for 1-2um dep?

solankak at solankak at
Thu Jul 26 13:59:59 PDT 2007

Hi, I want to run LTO400 for an oxide deposition anywhere between 1-2um 
thick in the tylanbpsg, but my reservation is not for awhile. Does 
anywone have space during their time or does not need their reservation 
anymore in the next couple of days? I have 8 wafers to deposit, but can 
use either the metal or non-metal boat.  Thanks in advance,
  Allison Solanki
  solankak at

More information about the tylanbpsg mailing list