Running LTO400 for 1-2um dep?
A. Alvin Barlian
barlian at stanford.edu
Thu Jul 26 14:07:49 PDT 2007
i have reservation at 8am tomorrow morning and i need to deposit
about 1-1.2 um of LTO at LTO400... you can come and join me, maybe we
can share the task of cleaning the wafers somehow..
also, how long does it take to do LTO400?
On Jul 26, 2007, at 1:59 PM, solankak at whitman.edu wrote:
> Hi, I want to run LTO400 for an oxide deposition anywhere between
> 1-2um thick in the tylanbpsg, but my reservation is not for awhile.
> Does anywone have space during their time or does not need their
> reservation anymore in the next couple of days? I have 8 wafers to
> deposit, but can use either the metal or non-metal boat. Thanks in
> Allison Solanki
> solankak at whitman.edu
More information about the tylanbpsg