Running LTO400 for 1-2um dep?

Eric Perozziello eap at gloworm.Stanford.EDU
Thu Jul 26 14:32:54 PDT 2007

Hi Alvin,

I think I'm doing ~2 micron, so if that would work for you,
give me some wafers!


On Thu, 26 Jul 2007, A. Alvin Barlian wrote:

> i have reservation at 8am tomorrow morning and i need to deposit
> about 1-1.2 um of LTO at LTO400... you can come and join me, maybe we
> can share the task of cleaning the wafers somehow..
> also, how long does it take to do LTO400?
> On Jul 26, 2007, at 1:59 PM, solankak at wrote:
> > Hi, I want to run LTO400 for an oxide deposition anywhere between
> > 1-2um thick in the tylanbpsg, but my reservation is not for awhile.
> > Does anywone have space during their time or does not need their
> > reservation anymore in the next couple of days? I have 8 wafers to
> > deposit, but can use either the metal or non-metal boat.  Thanks in
> > advance,
> >  Allison Solanki
> >  solankak at

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