From rik9 at stanford.edu  Wed May  2 16:50:27 2007
From: rik9 at stanford.edu (rik9 at stanford.edu)
Date: Wed, 02 May 2007 16:50:27 -0700
Subject: Unused reservations
Message-ID: <20070502165027.l72oeeva5asgko00@webmail.stanford.edu>

If anyone who has reserved the bpsg furnace is not planning on using  
their reservation over the next few days, could you please send out an  
email as it is quite heavily booked?

Thanks,
Rishi


From ofidaner at stanford.edu  Wed May  2 17:11:07 2007
From: ofidaner at stanford.edu (Onur Fidaner)
Date: Wed, 02 May 2007 17:11:07 -0700
Subject: (LTO) res. deleted 12 am-3:30 am
Message-ID: <6.0.1.1.2.20070502171024.01f3dc08@ofidaner.pobox.stanford.edu>

Thanks for reminding ...



From fengj at stanford.edu  Wed May  2 18:09:48 2007
From: fengj at stanford.edu (Jia Feng)
Date: Wed, 2 May 2007 18:09:48 -0700
Subject: Unused reservations
References: <20070502165027.l72oeeva5asgko00@webmail.stanford.edu>
Message-ID: <01ee01c78d1f$bf89cc10$22b60c80@FENG>

Cancelled 8:30 pm - 11:30 pm

----- Original Message ----- 
From: <rik9 at stanford.edu>
To: <tylanbpsg at snf.stanford.edu>
Sent: Wednesday, May 02, 2007 4:50 PM
Subject: Unused reservations


> If anyone who has reserved the bpsg furnace is not planning on using  
> their reservation over the next few days, could you please send out an  
> email as it is quite heavily booked?
> 
> Thanks,
> Rishi

From rik9 at stanford.edu  Wed May  2 23:12:01 2007
From: rik9 at stanford.edu (rik9 at stanford.edu)
Date: Wed, 02 May 2007 23:12:01 -0700
Subject: reservation cancelled 12-3:30 am Thursday morning
Message-ID: <20070502231201.w3vb0g8nm1lskgg8@webmail.stanford.edu>

LTO dep rate seems to be too unstable for me to want to try it.


From grahamab at stanford.edu  Wed May  2 23:18:27 2007
From: grahamab at stanford.edu (Andrew Graham)
Date: Wed, 02 May 2007 23:18:27 -0700
Subject: reservation cancelled 5-8:30am Thursday morning
In-Reply-To: <20070502231201.w3vb0g8nm1lskgg8@webmail.stanford.edu>
References: <20070502231201.w3vb0g8nm1lskgg8@webmail.stanford.edu>
Message-ID: <20070502231827.u9v4n8qe2vc4ksw4@webmail.stanford.edu>

Sorry for the late notice, but I was hoping to hear some news on the  
dep rates before throwing my own wafers in.




From grahamab at stanford.edu  Thu May  3 13:49:17 2007
From: grahamab at stanford.edu (Andrew Graham)
Date: Thu, 03 May 2007 13:49:17 -0700
Subject: LTO free 5-7:30pm
Message-ID: <20070503134917.kr9xr8i7a1sg8ogk@webmail.stanford.edu>

The person before me didn't show, so I should be done by 5pm.


From grahamab at stanford.edu  Sat May  5 14:06:04 2007
From: grahamab at stanford.edu (Andrew Graham)
Date: Sat, 05 May 2007 14:06:04 -0700
Subject: LTO reservation cancelled for sunday morning
Message-ID: <20070505140604.ibon71ejae0c0wcg@webmail.stanford.edu>




From rwoo at stanford.edu  Sun May  6 21:10:09 2007
From: rwoo at stanford.edu (Raymond Woo)
Date: Sun, 06 May 2007 21:10:09 -0700
Subject: tylanBPSG free all night
Message-ID: <463EA6A1.7030001@stanford.edu>

Sorry for the late notice - don't blame me, blame epi2.


From kevhuang at stanford.edu  Wed May  9 23:25:31 2007
From: kevhuang at stanford.edu (Kevin Huang)
Date: Wed, 9 May 2007 23:25:31 -0700
Subject: particles in LTO gone?
Message-ID: <93586f8c0705092325j1f04fd02p359b5f4cd9a1141c@mail.gmail.com>

Hi,
        Could anyone please tell me if the particle issue is gone after the
boat change for the LTO300 and LTO400 recipes?

Thanks.

Kevin

-- 
==================================
Kevin Huang
Ph.D. Candidate
Stanford Organic Electronics Lab
Dept. of Electrical Engineering
Email: kevhuang at stanford.edu
Phone: (650) 725-6924
==================================
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From maurice at stanford.edu  Thu May 10 09:53:50 2007
From: maurice at stanford.edu (maurice stevens)
Date: Thu, 10 May 2007 09:53:50 -0700
Subject: BPSG down Monday for a clean
Message-ID: <46434E1E.3040309@stanford.edu>

TylanBPSG will be going down Monday for a pull and clean.  If all goes 
well, it will be up Tues.

Users who had reservation on Monday and Tues (myself included) will be 
"bumped off".  Sorry for the inconvenience.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From kevhuang at stanford.edu  Thu May 10 10:52:48 2007
From: kevhuang at stanford.edu (Kevin Huang)
Date: Thu, 10 May 2007 10:52:48 -0700
Subject: reservation canceled today from 10:30 to 2:30pm
Message-ID: <93586f8c0705101052h366e6552le4a1a67a1ae64098@mail.gmail.com>

didn't want to risk having particles

-- 
==================================
Kevin Huang
Ph.D. Candidate
Stanford Organic Electronics Lab
Dept. of Electrical Engineering
Email: kevhuang at stanford.edu
Phone: (650) 725-6924
==================================
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From aeonia at gmail.com  Fri May 11 23:13:31 2007
From: aeonia at gmail.com (Hyeun-Su Kim)
Date: Fri, 11 May 2007 23:13:31 -0700
Subject: [tylanbpsg] reservation canceled (sat 0~8, sun 0~8)
Message-ID: <a308718c0705112313n1f2964b7w31e12fc469aaa62e@mail.gmail.com>

The sample is not ready because gryphon is down.
Sorry for the late notice.
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From tberg at snf.stanford.edu  Fri May 18 12:49:53 2007
From: tberg at snf.stanford.edu (Ted Berg)
Date: Fri, 18 May 2007 12:49:53 -0700
Subject: Update on BPSG
Message-ID: <464E0361.3090500@snf.stanford.edu>

Hello All,
    Just a quick update on BPSG . We have had an alarm on the mfs460 
foir the past few days. It saysSiH4 leak we have tried to zero the 
signal but it did not work. we have ordered parts to hopefully make the 
repair.


From robinhmb at yahoo.com  Thu May 31 00:12:38 2007
From: robinhmb at yahoo.com (Robin King)
Date: Thu, 31 May 2007 00:12:38 -0700 (PDT)
Subject: LTO400 test runs are done---  results look good
Message-ID: <291883.77395.qm@web58710.mail.re1.yahoo.com>

Dear Tylanbpsg users,

I ran two thin LTO400 tests today using 00:01:37 and they came out
nice and uniform across the wafer and the boats, and repeatable.  The
front boat runs about 10% thinner than the rear metal boat but that
may be typical.  The refractive index is high but may because of the
short dep time.   See attached for details.  

Hoon is running a longer deposition so please check with him for more
info. 

I think the tube is OK to use.  Thanks Ray, Mike, Ted and Maurice!


       
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