LTO400 test runs are done--- results look good
robinhmb at yahoo.com
Thu May 31 00:12:38 PDT 2007
Dear Tylanbpsg users,
I ran two thin LTO400 tests today using 00:01:37 and they came out
nice and uniform across the wafer and the boats, and repeatable. The
front boat runs about 10% thinner than the rear metal boat but that
may be typical. The refractive index is high but may because of the
short dep time. See attached for details.
Hoon is running a longer deposition so please check with him for more
I think the tube is OK to use. Thanks Ray, Mike, Ted and Maurice!
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