micron oxide bpsg run help

Pradeep Senanayake pradeepnuwan at gmail.com
Fri Nov 9 12:56:03 PST 2007


Hi bpsg users,
I have a need to deposit a micron of oxide on 1 SOI wafer, that has to
be prepared for testing. The wafer is clean. Any thickness of about a
micron would do. If you are running a process that deposits a micron
of oxide (or thereabouts) please let me know.
I appreciate your help.

Pradeep.
coral login:pradeep13



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