From maurice at stanford.edu Fri Aug 8 17:24:39 2008 From: maurice at stanford.edu (maurice stevens) Date: Fri, 08 Aug 2008 17:24:39 -0700 Subject: LTO yellow lighted for weekend Message-ID: <489CE3C7.2050303@stanford.edu> LTO process testing is not yet complete but it is being yellow lighted for the weekend. If you are doing capping layers or sacrificial layers the system may be ok. We do not recommend using it for device layers. The LTO300 and LTO400 recipes have been modified (and will be modified again next week) ,the deposition rates have changed so you should run tests before committing any wafers. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Mon Aug 11 16:56:00 2008 From: maurice at stanford.edu (maurice stevens) Date: Mon, 11 Aug 2008 16:56:00 -0700 Subject: Injector direction moved Message-ID: <48A0D190.4020001@stanford.edu> We are still testing in the system to improve the uniformity in the tube. The gas injectors along the bottom of the tube have been redirected. This change may will cause deposition to be different. If you need to use the tube tonight, you should do a test run first to check the deposition rate and to confirm that the uniformity meets your needs. We hope to have all the testing done soon (a few days) and will update our progress as we move forward. -------- Original Message -------- Subject: Comment tylanbpsg SNF 2008-08-11 16:17:46: Injector direction moved Date: Mon, 11 Aug 2008 16:17:46 -0700 From: maurice at snf.stanford.edu To: tylanbpsg-pcs at snf.stanford.edu Was / \ (~45 degrees inward) now / / (~45 to the right) -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From okilic at stanford.edu Thu Aug 14 16:39:58 2008 From: okilic at stanford.edu (Onur Kilic) Date: Thu, 14 Aug 2008 16:39:58 -0700 Subject: [LTO] Removed part of my reservation for tonight Message-ID: <2f2f0d6f0808141639w1beb3667m45674b8b6c19e1fa@mail.gmail.com> Used 10 wafers last night (LTO400). LTO on 1st wafer was 85-90% more than on the 10th wafer. Removed part of my reservation for tonight. -- Onur Kilic Applied Physics Stanford University OnurKilic.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From masatoi at stanford.edu Thu Aug 14 18:26:33 2008 From: masatoi at stanford.edu (masatoi at stanford.edu) Date: Thu, 14 Aug 2008 18:26:33 -0700 Subject: LTO free from 8pm to 10pm today In-Reply-To: <2f2f0d6f0808141639w1beb3667m45674b8b6c19e1fa@mail.gmail.com> References: <2f2f0d6f0808141639w1beb3667m45674b8b6c19e1fa@mail.gmail.com> Message-ID: <20080814182633.62lqt14vocowgwkk@webmail.stanford.edu> Samples not ready. Sorry for the late notice. From maurice at stanford.edu Fri Aug 15 18:44:56 2008 From: maurice at stanford.edu (maurice stevens) Date: Fri, 15 Aug 2008 18:44:56 -0700 Subject: LTO heating up Message-ID: <48A63118.9030408@stanford.edu> Once furnace reaches 350c it can be used. -------- Original Message -------- Subject: Comment tylanbpsg SNF 2008-08-15 18:41:01: Furnace element connection cleaned Date: Fri, 15 Aug 2008 18:41:02 -0700 From: maurice at snf.stanford.edu To: tylanbpsg-pcs at snf.stanford.edu Jim M. found a bad connection on furnace element. He cleaned contacts. Furnace heating up -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From robinhmb at yahoo.com Fri Aug 15 19:15:37 2008 From: robinhmb at yahoo.com (Robin King) Date: Fri, 15 Aug 2008 19:15:37 -0700 (PDT) Subject: LTO is free 8pm to 11:30pm Friday In-Reply-To: <48A63118.9030408@stanford.edu> Message-ID: <691513.37122.qm@web58710.mail.re1.yahoo.com> It's all yours. From maurice at stanford.edu Fri Aug 22 14:21:51 2008 From: maurice at stanford.edu (Maurice Stevens) Date: Fri, 22 Aug 2008 14:21:51 -0700 Subject: New!! Four LTO boats! Message-ID: <48AF2DEF.2050209@stanford.edu> Hey LTOers, It is not really that exciting. We have added 2 more boats to LTO to try and get better wafer to wafer uniformity. The first and the last boats are dummy boats. Don't load your wafers in these two boats. The Non metal boat was the first boat...it is now the second. The metal boat was the second boat...it is now the third. If you have any questions (about the boat only), contact Me or Nancy or Ed or Ted or Ray or... -m From maurice at stanford.edu Mon Aug 25 18:16:49 2008 From: maurice at stanford.edu (Maurice Stevens) Date: Mon, 25 Aug 2008 18:16:49 -0700 Subject: [Fwd: Problem tylanbpsg SNF 2008-08-25 18:16:03: Temp gradient along tube] Message-ID: <48B35981.10306@stanford.edu> -------------- next part -------------- An embedded message was scrubbed... From: maurice at snf.stanford.edu Subject: Problem tylanbpsg SNF 2008-08-25 18:16:03: Temp gradient long tube Date: Mon, 25 Aug 2008 18:16:04 -0700 Size: 1950 URL: From maurice at stanford.edu Thu Aug 28 18:44:25 2008 From: maurice at stanford.edu (maurice stevens) Date: Thu, 28 Aug 2008 18:44:25 -0700 Subject: LTO up/test results Message-ID: <48B75479.9030205@stanford.edu> Attached are results of the test after the LTO temp cal Wafer1 is in the center of the first boat (dummy boat). Wafers 2 ,3 and 4 were in the position 3,7 and 11 (the our standard test positions) of the second boat. Wafers 5 ,6 and 7 were in the position 3,7 and 11 (the our standard test positions) of the third boat. Wafer 8 is in the center of the fourth boat (dummy boat). We will continue working on the uniformity. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- A non-text attachment was scrubbed... Name: J9-1.xls Type: application/vnd.ms-excel Size: 21504 bytes Desc: not available URL: From maurice at stanford.edu Fri Aug 29 09:20:33 2008 From: maurice at stanford.edu (maurice stevens) Date: Fri, 29 Aug 2008 09:20:33 -0700 Subject: removed reservations Message-ID: <48B821D1.4000900@stanford.edu> Hi, Remember to remove reservation you will not use and send out an email. BPSG is booked solid for the next week. If you don't use your reservation, I am afraid other users will hunt you down. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From masaharu at stanford.edu Fri Aug 29 09:38:37 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Fri, 29 Aug 2008 09:38:37 -0700 (PDT) Subject: BPSG free until 12:00 Message-ID: <116209504.223831220027917004.JavaMail.root@zm07.stanford.edu> sorry for short notice From yinghao.kuo at gmail.com Sat Aug 30 18:34:37 2008 From: yinghao.kuo at gmail.com (Ying-Hao Kuo) Date: Sat, 30 Aug 2008 18:34:37 -0700 Subject: tylanbpsg reservation released 9:00-10:30PM (Saturday) Message-ID: Sorry for short notice -------------- next part -------------- An HTML attachment was scrubbed... URL: