LTO yellow lighted for weekend

maurice stevens maurice at
Fri Aug 8 17:24:39 PDT 2008

LTO process testing is not yet complete but it is being yellow lighted for the weekend.  If you are doing capping layers or sacrificial layers the system may be ok.  We do not recommend using it for device layers.

The LTO300 and LTO400 recipes have been modified (and will be modified again next week) ,the deposition rates have changed so you should run tests before committing any wafers. 

maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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