Injector direction moved

maurice stevens maurice at stanford.edu
Mon Aug 11 16:56:00 PDT 2008


We are still testing in the system to improve the uniformity in the 
tube.  The gas injectors along the bottom of the tube have been redirected.

This change may will cause deposition to be different.  If you need to 
use the tube tonight, you should do a test run first to check the 
deposition rate and to confirm that the uniformity meets your needs.

We hope to have all the testing done soon (a few days) and will update 
our progress as we move forward.

-------- Original Message --------
Subject: 	Comment tylanbpsg SNF 2008-08-11 16:17:46: Injector direction 
moved
Date: 	Mon, 11 Aug 2008 16:17:46 -0700
From: 	maurice at snf.stanford.edu
To: 	tylanbpsg-pcs at snf.stanford.edu



Was   /   \  (~45 degrees inward)
now  /   /    (~45 to the right)



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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