New!! Four LTO boats!
maurice at stanford.edu
Fri Aug 22 14:21:51 PDT 2008
It is not really that exciting. We have added 2 more boats to LTO to
try and get better wafer to wafer uniformity.
The first and the last boats are dummy boats. Don't load your wafers in
these two boats.
The Non metal boat was the first boat...it is now the second.
The metal boat was the second boat...it is now the third.
If you have any questions (about the boat only), contact Me or Nancy or
Ed or Ted or Ray or...
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