LTO up/test results

maurice stevens maurice at stanford.edu
Thu Aug 28 18:44:25 PDT 2008


Attached are  results of the test after the LTO temp cal
Wafer1 is in the center of the first boat (dummy boat).
Wafers 2 ,3 and 4 were in the position 3,7 and 11 (the our standard test 
positions) of the second boat.
Wafers 5 ,6 and 7 were in the position 3,7 and 11 (the our standard test 
positions) of the third boat.
Wafer 8 is in the center of the fourth boat (dummy boat).

We will continue working on the uniformity.


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

-------------- next part --------------
A non-text attachment was scrubbed...
Name: J9-1.xls
Type: application/vnd.ms-excel
Size: 21504 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/tylanbpsg/attachments/20080828/a989502f/attachment.xls>


More information about the tylanbpsg mailing list