From mferrier at stanford.edu Tue Jul 1 14:15:59 2008 From: mferrier at stanford.edu (Marlene Marjorie Ferrier) Date: Tue, 01 Jul 2008 14:15:59 -0700 Subject: Tylan BPSG free 3:30-7:30 Message-ID: <20080701141559.tfkwk2ow84o4gw4w@webmail.stanford.edu> I apologize for the late notice From maurice at stanford.edu Mon Jul 7 16:15:05 2008 From: maurice at stanford.edu (maurice stevens) Date: Mon, 07 Jul 2008 16:15:05 -0700 Subject: New!! WBSilicide features! Message-ID: <4872A379.10502@stanford.edu> The silicide bench has to be enabled to drain acids, dump rinse or spin dry. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From gthareja at stanford.edu Sat Jul 12 12:55:15 2008 From: gthareja at stanford.edu (gthareja at stanford.edu) Date: Sat, 12 Jul 2008 12:55:15 -0700 Subject: LTO free from 2pm Message-ID: <20080712125515.o38r58iqdc0gkswc@webmail.stanford.edu> samples not ready, sorry for this late notice From gthareja at stanford.edu Sun Jul 13 13:32:01 2008 From: gthareja at stanford.edu (gthareja at stanford.edu) Date: Sun, 13 Jul 2008 13:32:01 -0700 Subject: LTO free at 9pm today Message-ID: <20080713133201.k573xctx4wkc088o@webmail.stanford.edu> From masatoi at stanford.edu Mon Jul 14 17:45:29 2008 From: masatoi at stanford.edu (masatoi at stanford.edu) Date: Mon, 14 Jul 2008 17:45:29 -0700 Subject: LTO free from 0am to 3am tomorrow In-Reply-To: <20080713133201.k573xctx4wkc088o@webmail.stanford.edu> References: <20080713133201.k573xctx4wkc088o@webmail.stanford.edu> Message-ID: Samples not ready From masaharu at stanford.edu Tue Jul 15 00:26:41 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Tue, 15 Jul 2008 00:26:41 -0700 Subject: LTO free until 3am Message-ID: <20080715002641.k0xnaabuiowosokw@webmail.stanford.edu> sorry for late notice From kattsai at stanford.edu Tue Jul 15 11:28:31 2008 From: kattsai at stanford.edu (Katherine Tsai) Date: Tue, 15 Jul 2008 11:28:31 -0700 Subject: LTO free 1:30 - 5:30 PM today Message-ID: <1c62e49d0807151128s63707005rdb1f110d0e84a95@mail.gmail.com> Since the tube hasn't been tested since being brought back online, and I have real wafers to process, I canceled my reservation. Apologies for the short notice. Kat -------------- next part -------------- An HTML attachment was scrubbed... URL: From robinhmb at yahoo.com Wed Jul 16 04:08:08 2008 From: robinhmb at yahoo.com (Robin King) Date: Wed, 16 Jul 2008 04:08:08 -0700 (PDT) Subject: LTO test results Message-ID: <797211.17730.qm@web58713.mail.re1.yahoo.com> The LTO tube came back up today and after an initial coat (6000A?) needed a test run. RUN 1: Coated additional 45 min with LTO400 to help stabilize dep rate. Then three runs with 11 wafers each in metal and nonmetal boats, loaded every other slot: RUN 2 LTO400 for 00:04:45. All bare Si test wfs. Metal boat = 890A or 134A/min Nonmetal boat = 826A or 131A/min Particles barely visible RUN 3 LTO400 for 00:05:30. Metal boat = 1124A or 219A/min Nonmetal boat = 954A, or 185.73 A/min Particles, but very small RUN 4 LTO400 for 00:05:20 Metal boat = 1117AA or 209A/min Nometal boat = 966A or 193.2A/min More particles. Still smaller and fewer than before tube clean but becoming more of a problem. From robinhmb at yahoo.com Wed Jul 16 14:11:08 2008 From: robinhmb at yahoo.com (Robin King) Date: Wed, 16 Jul 2008 14:11:08 -0700 (PDT) Subject: LTO is available until 5pm Message-ID: <522514.50920.qm@web58709.mail.re1.yahoo.com> From masatoi at stanford.edu Wed Jul 16 20:54:46 2008 From: masatoi at stanford.edu (masatoi at stanford.edu) Date: Wed, 16 Jul 2008 20:54:46 -0700 Subject: LTO free from 4am-6:30am tomorrow In-Reply-To: <522514.50920.qm@web58709.mail.re1.yahoo.com> References: <522514.50920.qm@web58709.mail.re1.yahoo.com> Message-ID: <20080716205446.4zq13zb4g8osgowc@webmail.stanford.edu> I used earlier slot today. From masaharu at stanford.edu Thu Jul 17 00:55:06 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Thu, 17 Jul 2008 00:55:06 -0700 Subject: BPSG free until 4am Message-ID: <20080717005506.r2d2lr4ysw4w4c80@webmail.stanford.edu> sorry for the late notice, sample not ready From lwchang at stanford.edu Thu Jul 17 23:49:04 2008 From: lwchang at stanford.edu (Li-Wen Chang) Date: Thu, 17 Jul 2008 23:49:04 -0700 Subject: Tylanbpsg free 7/18 7:30pm-1am & 7/19 11am-3pm Message-ID: <8ab79e460807172349l403a1eekd746ab7bf5995dab@mail.gmail.com> Won't be ready... From masaharu at stanford.edu Fri Jul 18 00:18:43 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Fri, 18 Jul 2008 00:18:43 -0700 Subject: BPSG free until 4am Message-ID: <20080718001843.1egccdh08c08c8sc@webmail.stanford.edu> sorry for late notice, plan is delayed From robinhmb at yahoo.com Fri Jul 18 00:56:37 2008 From: robinhmb at yahoo.com (Robin King) Date: Fri, 18 Jul 2008 00:56:37 -0700 (PDT) Subject: BPSG free until 4am In-Reply-To: <20080718001843.1egccdh08c08c8sc@webmail.stanford.edu> Message-ID: <99368.42232.qm@web58712.mail.re1.yahoo.com> Thanks Masaharu, I took the reservation. --- On Fri, 7/18/08, Masaharu Kobayashi wrote: > From: Masaharu Kobayashi > Subject: BPSG free until 4am > To: tylanbpsg at snf.stanford.edu > Date: Friday, July 18, 2008, 12:18 AM > sorry for late notice, plan is delayed From maurice at stanford.edu Fri Jul 18 16:16:49 2008 From: maurice at stanford.edu (maurice stevens) Date: Fri, 18 Jul 2008 16:16:49 -0700 Subject: remove reservations! Message-ID: <48812461.7000000@stanford.edu> This is the last weekend before LTO goes down. Please remember to remove reservation you can't use and send an email out to the user group. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From robinhmb at yahoo.com Fri Jul 18 19:51:28 2008 From: robinhmb at yahoo.com (Robin King) Date: Fri, 18 Jul 2008 19:51:28 -0700 (PDT) Subject: LTO is available Sunday Message-ID: <774191.35439.qm@web58708.mail.re1.yahoo.com> I just cancelled a long reservation. From munehiro at stanford.edu Sat Jul 19 00:23:36 2008 From: munehiro at stanford.edu (Munehiro TADA) Date: Sat, 19 Jul 2008 00:23:36 -0700 Subject: LTO free tomorrow 18:30- In-Reply-To: <774191.35439.qm@web58708.mail.re1.yahoo.com> References: <774191.35439.qm@web58708.mail.re1.yahoo.com> Message-ID: <48819678.1000202@stanford.edu> From gthareja at stanford.edu Sat Jul 19 03:38:42 2008 From: gthareja at stanford.edu (gthareja at stanford.edu) Date: Sat, 19 Jul 2008 03:38:42 -0700 Subject: LTO free at 8am Message-ID: <20080719033842.agpifvnvkkockwc4@webmail.stanford.edu> sorry for the late notice, samples not ready, took a later slot thanks -gaurav From rshyam at stanford.edu Sat Jul 19 19:38:31 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Sat, 19 Jul 2008 19:38:31 -0700 Subject: LTO free from 10 pm to 12 am tonight Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From maryamzm at stanford.edu Sun Jul 20 16:05:59 2008 From: maryamzm at stanford.edu (Maryam Ziaei-Moayyed) Date: Sun, 20 Jul 2008 16:05:59 -0700 Subject: LTO free from now till 5:30 In-Reply-To: References: Message-ID: <20080720160559.lvty1cd7kkk8cgog@webmail.stanford.edu>