LTO test results
robinhmb at yahoo.com
Wed Jul 16 04:08:08 PDT 2008
The LTO tube came back up today and after an initial coat (6000A?) needed a test run.
Coated additional 45 min with LTO400 to help stabilize dep rate.
Then three runs with 11 wafers each in metal and nonmetal boats, loaded every other slot:
LTO400 for 00:04:45. All bare Si test wfs.
Metal boat = 890A or 134A/min
Nonmetal boat = 826A or 131A/min
Particles barely visible
LTO400 for 00:05:30.
Metal boat = 1124A or 219A/min
Nonmetal boat = 954A, or 185.73 A/min
Particles, but very small
LTO400 for 00:05:20
Metal boat = 1117AA or 209A/min
Nometal boat = 966A or 193.2A/min
More particles. Still smaller and fewer than before tube clean but becoming more of a problem.
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