From envy at ee.ucla.edu Sat Mar 1 09:31:08 2008 From: envy at ee.ucla.edu (Girish) Date: Sat, 1 Mar 2008 09:31:08 -0800 (PST) Subject: LTO free from 9:30-noon Message-ID: Sorry for the late notice. From rseymour at stanford.edu Fri Mar 7 11:04:47 2008 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 07 Mar 2008 11:04:47 -0800 Subject: [POSSIBLE VIRUS:###] [Fwd: BPSG] Message-ID: <47D191CF.2050802@stanford.edu> -------------- next part -------------- An embedded message was scrubbed... From: Ray Seymour Subject: BPSG Date: Fri, 07 Mar 2008 11:02:06 -0800 Size: 618 URL: From robinhmb at yahoo.com Fri Mar 7 19:59:56 2008 From: robinhmb at yahoo.com (Robin King) Date: Fri, 7 Mar 2008 19:59:56 -0800 (PST) Subject: LTO tube is free until 10:30pm Message-ID: <360657.70483.qm@web58714.mail.re1.yahoo.com> We finished early and now the tube is free until 10:30 tonight for yuhykr's reservation. Per Maurice's notes you have to pull the boat out by hand, literally manually. Be sure it's fully vented first. ____________________________________________________________________________________ Looking for last minute shopping deals? Find them fast with Yahoo! Search. http://tools.search.yahoo.com/newsearch/category.php?category=shopping From robinhmb at yahoo.com Tue Mar 11 16:51:13 2008 From: robinhmb at yahoo.com (Robin King) Date: Tue, 11 Mar 2008 16:51:13 -0700 (PDT) Subject: LTO400 film integrity Message-ID: <21448.31728.qm@web58703.mail.re1.yahoo.com> If you've deposited LTO400 since the tube was cleaned would you please inspect your test wafers? We had two runs of 1000A each on Friday using the metal boat and see tiny pinholes and hazy roughness which are readily visible under DF. The pinholes are visible under BF at higher mag if you look closely, along with larger spots. Runs previous to the clean didn't have these defects. It's not just a surface problem because it persists after partially etching the film. Refractive index by Rudolph ellipsometer was 1.457 to 1.461; typical is about 1.470. Maybe with more depositions the problem will go away. Could users please carefully inspect their bare Si test wafers and let the other users know your results? Thanks, Robin King/IBM Almaden Research Center ____________________________________________________________________________________ Never miss a thing. Make Yahoo your home page. http://www.yahoo.com/r/hs From duygu at stanford.edu Tue Mar 11 21:06:52 2008 From: duygu at stanford.edu (Duygu Kuzum) Date: Tue, 11 Mar 2008 21:06:52 -0700 Subject: 9pm-12am reservation cancelled In-Reply-To: <21448.31728.qm@web58703.mail.re1.yahoo.com> References: <21448.31728.qm@web58703.mail.re1.yahoo.com> Message-ID: <20080311210652.p8xnxe5w08oookw0@webmail.stanford.edu> Sorry for late notice. Quoting Robin King : > If you've deposited LTO400 since the tube was cleaned would you > please inspect your test wafers? We had two runs of 1000A each on > Friday using the metal boat and see tiny pinholes and hazy roughness > which are readily visible under DF. The pinholes are visible under > BF at higher mag if you look closely, along with larger spots. Runs > previous to the clean didn't have these defects. It's not just a > surface problem because it persists after partially etching the film. > Refractive index by Rudolph ellipsometer was 1.457 to 1.461; typical > is about 1.470. > > Maybe with more depositions the problem will go away. Could users > please carefully inspect their bare Si test wafers and let the other > users know your results? > > Thanks, > > Robin King/IBM Almaden Research Center > > > > > ____________________________________________________________________________________ > Never miss a thing. Make Yahoo your home page. > http://www.yahoo.com/r/hs > From maurice at stanford.edu Wed Mar 12 09:45:25 2008 From: maurice at stanford.edu (maurice stevens) Date: Wed, 12 Mar 2008 09:45:25 -0700 Subject: Remove reservations/send email Message-ID: <47D808A5.3080208@stanford.edu> Please remove reservations that you are not going to use and send an email to the user group. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From munehiro at stanford.edu Wed Mar 12 09:55:57 2008 From: munehiro at stanford.edu (Munehiro TADA) Date: Wed, 12 Mar 2008 09:55:57 -0700 Subject: LTO tube is free from 11am to 1pm today Message-ID: <47D80B1D.8090901@stanford.edu> From fengj at stanford.edu Wed Mar 12 17:25:34 2008 From: fengj at stanford.edu (Jia Feng) Date: Wed, 12 Mar 2008 17:25:34 -0700 Subject: tylanbpsg free 3:30-5:30 pm tomorrow Message-ID: <20080312172534.b7j5q1tq884ccs80@webmail.stanford.edu> Done early. From maurice at stanford.edu Thu Mar 13 09:42:33 2008 From: maurice at stanford.edu (maurice stevens) Date: Thu, 13 Mar 2008 09:42:33 -0700 Subject: [Fwd: Problem tylanbpsg SNF 2008-03-13 09:29:02: Pinholes or particles noted] Message-ID: <47D95979.1040907@stanford.edu> -------- Original Message -------- Subject: Problem tylanbpsg SNF 2008-03-13 09:29:02: Pinholes or particles noted Date: Thu, 13 Mar 2008 09:29:03 -0700 From: mtang at snf.stanford.edu To: tylanbpsg-pcs at snf.stanford.edu Be aware that pinholes are particles have been observed on a couple of runs and confirmed by Maurice. We are shorthanded on maintenance today and will be investigating as we can. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From masatoi at stanford.edu Mon Mar 17 13:42:54 2008 From: masatoi at stanford.edu (masatoi at stanford.edu) Date: Mon, 17 Mar 2008 13:42:54 -0700 Subject: LTO Free from 10:00am to =?ISO-2022-JP?B?MRskQiEnGyhCMzBwbQ==?= tomorrow In-Reply-To: <47D80B1D.8090901@stanford.edu> References: <47D80B1D.8090901@stanford.edu> Message-ID: From maurice at stanford.edu Mon Mar 17 17:10:25 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Mon, 17 Mar 2008 17:10:25 -0700 Subject: BPSG up Message-ID: <20080317171025.yaapy1sy04s88wg8@webmail.stanford.edu> System is free until 11:00am tomorrow. System pulled and cleaned back to pump. Coat and test complete. LTO400 00:20:00 expected 4000 actual 4269Ang Dark field looks good. No particles. (Good job Ray and Mike!) From bli003 at student.ucr.edu Thu Mar 20 16:10:30 2008 From: bli003 at student.ucr.edu (bli003 at student.ucr.edu) Date: Thu, 20 Mar 2008 16:10:30 -0700 (PDT) Subject: LTO free 4:30pm-7:30pm Message-ID: <20080320161030.BUU22392@smh.ucr.edu> Sorry for the late notice. Thanks ============================== Graduate Student QSL Lab.,EngrII 228 Dept.of Electrical Engineering University of California Riverside, CA 92521 Ph.# (951) 827-6275 Fax# (951) 827-2425 http://qsl.ee.ucr.edu/ ============================== From nlatta at stanford.edu Fri Mar 21 14:19:53 2008 From: nlatta at stanford.edu (Nancy Latta) Date: Fri, 21 Mar 2008 14:19:53 -0700 Subject: Particle Problem in LTO Message-ID: <47E42679.50303@stanford.edu> Folks, Earlier this week particles were observed in LTO films. We have been trying to track down the source of the problem with little success. At present the system has been yellow lighted so that users of the tool who do not care about particles can use it. Please do not misconstrue that the problem has been solved; it hasn't. Use tylanbpsg at your own risk. For a complete timeline of what has been done to solve the issue please look at comments in coral. -Nancy From jrjain at stanford.edu Mon Mar 31 17:24:01 2008 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Mon, 31 Mar 2008 17:24:01 -0700 Subject: tylanbpsg free at 8pm Message-ID: <001301c8938e$afcbd770$913242ab@jrjain> -------------- next part -------------- An HTML attachment was scrubbed... URL: