9pm-12am reservation cancelled
duygu at stanford.edu
Tue Mar 11 21:06:52 PDT 2008
Sorry for late notice.
Quoting Robin King <robinhmb at yahoo.com>:
> If you've deposited LTO400 since the tube was cleaned would you
> please inspect your test wafers? We had two runs of 1000A each on
> Friday using the metal boat and see tiny pinholes and hazy roughness
> which are readily visible under DF. The pinholes are visible under
> BF at higher mag if you look closely, along with larger spots. Runs
> previous to the clean didn't have these defects. It's not just a
> surface problem because it persists after partially etching the film.
> Refractive index by Rudolph ellipsometer was 1.457 to 1.461; typical
> is about 1.470.
> Maybe with more depositions the problem will go away. Could users
> please carefully inspect their bare Si test wafers and let the other
> users know your results?
> Robin King/IBM Almaden Research Center
> Never miss a thing. Make Yahoo your home page.
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