Deposition of Thick 5 microns

Xiao Hann Lim xhlim at
Mon Nov 3 15:46:03 PST 2008

Hi all,

I am planning to deposit 5 microns of LTO400 oxide. Maurice said I can do that if I sent out an email asking if other people might want to put their wafers in with mine in the same run.  

I will be putting in my wafers in at 5 pm this afternoon, so let me know if you have wafers that you want to go into the tube as well. 

Xiao Hann

More information about the tylanbpsg mailing list