Deposition of thick oxide

Xiao Hann Lim xhlim at stanford.edu
Mon Nov 24 08:31:53 PST 2008


Hi all,

I am planning to deposit 5 microns of LTO400PC oxide. Maurice said I can do that if I sent out an email asking if other people might want to put their wafers in with mine in the same run.  

I will be putting in my wafers in at 2 pm this afternoon, so let me know if you have wafers that you want to go into the tube as well. 

Thanks,
Xiao Hann



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