From jazz9152 at slac.stanford.edu Wed Oct 1 21:40:12 2008 From: jazz9152 at slac.stanford.edu (Jasmine Hasi) Date: Wed, 1 Oct 2008 21:40:12 -0700 (PDT) Subject: Cancelled reservation between 10.30-1.30 tomorrow Message-ID: I am unable to use my reservation tomorrow. I am sorry for the late notice Jasmine From lwchang at stanford.edu Thu Oct 2 22:03:49 2008 From: lwchang at stanford.edu (Li-Wen Chang) Date: Thu, 2 Oct 2008 22:03:49 -0700 Subject: BPSG free tomorrow 2-6pm Message-ID: <8ab79e460810022203k1ac42dfne00751278687837e@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Oct 22 16:54:55 2008 From: maurice at stanford.edu (maurice stevens) Date: Wed, 22 Oct 2008 16:54:55 -0700 Subject: New LTO400PC recipe Message-ID: <48FFBD4F.2070907@stanford.edu> Hey BPSGers, I have created a LTO400PC recipe. It is a pressure controlled version of the LTO400 recipe with pressure set to 200 mtorr. This new recipe will be more repeatable and it has a faster deposition rate than the old LTO recipe (the old recipe is currently running ~160 mtorr...so it deposits slower). LTO400PC ~3300A/min in the non metal boat LTO400 ~2250A/min in the non metal boat Try it out. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Fri Oct 24 09:17:59 2008 From: maurice at stanford.edu (maurice stevens) Date: Fri, 24 Oct 2008 09:17:59 -0700 Subject: LTO400PC dep rates Message-ID: <4901F537.3020107@stanford.edu> I put the incorrect deposition rates in my email for the New recipe. The thicknesses that I stated were for a deposition of 20min (not one min). correct rates: LTO400PC ~165A/min in the non metal boat LTO400 ~2250A/min in the non metal boat Sorry for the incorrect info (J and Roozbeh, can I buy you both the cool refreshing soft drinks of your choice?) -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From jasonlin at stanford.edu Mon Oct 27 12:12:58 2008 From: jasonlin at stanford.edu (J. Jason Lin) Date: Mon, 27 Oct 2008 12:12:58 -0700 Subject: Reservation removed 1:30-3:30 today Message-ID: Sorry for the late notice. Samples aren't ready. From tberg at stanford.edu Wed Oct 29 12:12:27 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 29 Oct 2008 12:12:27 -0700 Subject: Unused reservations Message-ID: <4908B59B.7010206@stanford.edu> Hello users, During the past couple of days i have noticed several instances of reservations made and not used or cancelled. This is not fair to other users nor to the staff trying to make plans to keep the tools up and running. Please be considerate when making and or cancelling reservations. I have also noticed several times the tube left in the last recipe and vented not in the pump program perhaps some users need retraining on proper procedures