New LTO400PC recipe

maurice stevens maurice at stanford.edu
Wed Oct 22 16:54:55 PDT 2008


Hey BPSGers,

I have created a LTO400PC recipe.  It is a pressure controlled version 
of the LTO400 recipe with pressure set to 200 mtorr. 
This new recipe will be more repeatable and it has a faster deposition 
rate than the old LTO recipe (the old recipe is currently running ~160 
mtorr...so it deposits slower).

LTO400PC   ~3300A/min in the non metal boat
LTO400       ~2250A/min in the non metal boat

Try it out.

-m


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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