LTO400PC dep rates

maurice stevens maurice at stanford.edu
Fri Oct 24 09:17:59 PDT 2008


I put the incorrect deposition rates in my email for the New recipe.  
The thicknesses that I stated were for a deposition of 20min (not one min).

correct rates:

LTO400PC   ~165A/min in the non metal boat
LTO400       ~2250A/min in the non metal boat

Sorry for the incorrect info (J and Roozbeh, can I buy you both the  
cool refreshing soft drinks of your choice?)


-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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