From robinhmb at yahoo.com Fri May 1 16:21:13 2009 From: robinhmb at yahoo.com (Robin King) Date: Fri, 1 May 2009 16:21:13 -0700 (PDT) Subject: reservation removed 4pm Fri Message-ID: <88084.86792.qm@web111514.mail.gq1.yahoo.com> I think the people with adjacent reservations are going to use it, but please check. -------------- next part -------------- An HTML attachment was scrubbed... URL: From hweiyin at stanford.edu Tue May 5 11:26:21 2009 From: hweiyin at stanford.edu (Serene Koh) Date: Tue, 5 May 2009 11:26:21 -0700 (PDT) Subject: reservation cancelled: 10pm to 1am tonight Message-ID: Sorry for the late notice. Wafers won't be ready. From gthareja at stanford.edu Wed May 6 00:39:52 2009 From: gthareja at stanford.edu (Gaurav Thareja) Date: Wed, 6 May 2009 00:39:52 -0700 (PDT) Subject: LTO free tomorrow morning. Message-ID: <236054931.1999291241595592586.JavaMail.root@zm06.stanford.edu> wafers not ready, sorry for the short notice. g -- Gaurav Thareja Ph.D candidate, Nishi group Electrical Engineering Stanford University 420 Via Palou Mall, CISX 128 Stanford, CA 94305 Tel: 650-704-1029 Email: gthareja at stanford.edu From maurice at stanford.edu Thu May 7 14:10:02 2009 From: maurice at stanford.edu (Maurice Stevens) Date: Thu, 07 May 2009 14:10:02 -0700 Subject: LTO free until 5:30 Message-ID: <4A034E2A.6040809@stanford.edu> Training cancelled. User didn't clean any wafers. -m From duygu at stanford.edu Fri May 8 14:00:42 2009 From: duygu at stanford.edu (Duygu Kuzum) Date: Fri, 8 May 2009 14:00:42 -0700 (PDT) Subject: bpsg free 5-9pm Message-ID: <986982488.3188901241816442329.JavaMail.root@zm03.stanford.edu> From hweiyin at stanford.edu Sun May 10 16:10:21 2009 From: hweiyin at stanford.edu (Serene Koh) Date: Sun, 10 May 2009 16:10:21 -0700 (PDT) Subject: tylanbpsg free tonight: 9pm-1am Message-ID: Equipment upstream is down, can't get my wafers out to the tube. From wessmith at stanford.edu Mon May 11 16:39:12 2009 From: wessmith at stanford.edu (Wes Smith) Date: Mon, 11 May 2009 16:39:12 -0700 Subject: Res. Released 21:00 to 2am Message-ID: From maurice at stanford.edu Tue May 12 17:33:07 2009 From: maurice at stanford.edu (maurice stevens) Date: Tue, 12 May 2009 17:33:07 -0700 Subject: Is LTO working? In-Reply-To: <20090512234720.29BDD4867AD@smtp4.stanford.edu> References: <20090512234720.29BDD4867AD@smtp4.stanford.edu> Message-ID: <4A0A1543.4070102@stanford.edu> Hi Robin, TylanBPSG seem to be having trouble with the LTO300 recipe. Serene reported that the front zone was not reaching set point with that recipe. We may need to do a temp profile at that temp or modify the program. (Hey Ted and Ray, I'm going to take the TCU CTLID commands out of the recipe and then see if it does better). The hotter temps are not having the problem (even 350 is stable). If someone notices anything else different, please put it on coral. king at snf.stanford.edu wrote: > Thank you. > > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From gthareja at stanford.edu Thu May 14 00:12:04 2009 From: gthareja at stanford.edu (Gaurav Thareja) Date: Thu, 14 May 2009 00:12:04 -0700 (PDT) Subject: LTO finished early Message-ID: <2059950174.3683071242285124898.JavaMail.root@zm06.stanford.edu> -- Gaurav Thareja Ph.D candidate, Nishi group Electrical Engineering Stanford University 420 Via Palou Mall, CISX 128 Stanford, CA 94305 Tel: 650-704-1029 Email: gthareja at stanford.edu From maurice at stanford.edu Fri May 15 15:11:35 2009 From: maurice at stanford.edu (Maurice Stevens) Date: Fri, 15 May 2009 15:11:35 -0700 Subject: Hey cancel your reservations! Message-ID: <4A0DE897.2060207@stanford.edu> If you are not going to use your reservation, remove it and send out an email letting the other user know it is free. From gthareja at stanford.edu Fri May 15 20:15:54 2009 From: gthareja at stanford.edu (Gaurav Thareja) Date: Fri, 15 May 2009 20:15:54 -0700 (PDT) Subject: LTO free tonight. finished at an earlier avaialble time slot. Message-ID: <1924258620.4052791242443754503.JavaMail.root@zm06.stanford.edu> From maurice at stanford.edu Mon May 18 17:17:19 2009 From: maurice at stanford.edu (maurice stevens) Date: Mon, 18 May 2009 17:17:19 -0700 Subject: BPSG temp cal starting Wed morning Message-ID: <4A11FA8F.2060809@stanford.edu> Tylan BPSG will be going down for a temp cal on Wed morning 6:00am. We expect that it will take at least two days. Please plan your processing accordingly. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Thu May 21 17:39:39 2009 From: maurice at stanford.edu (maurice stevens) Date: Thu, 21 May 2009 17:39:39 -0700 Subject: Ray says: BPSG is up! Message-ID: <4A15F44B.4090101@stanford.edu> Ray has just noted on coral that the Temp cal from 300 to 450c is complete and the tube has been released. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From rshyam at stanford.edu Fri May 22 23:08:30 2009 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Fri, 22 May 2009 23:08:30 -0700 (PDT) Subject: LTO free at 12 am Message-ID: <548595171.1240131243058910282.JavaMail.root@zm02.stanford.edu> From wessmith at stanford.edu Fri May 29 08:08:17 2009 From: wessmith at stanford.edu (Wes Smith) Date: Fri, 29 May 2009 08:08:17 -0700 Subject: Reservation Released 3:30 to 7:30pm 5/29/09 Message-ID: Sorry about the late notice, wafers won't be ready From gthareja at stanford.edu Sat May 30 18:45:51 2009 From: gthareja at stanford.edu (Gaurav Thareja) Date: Sat, 30 May 2009 18:45:51 -0700 (PDT) Subject: LTO free tomorrow. Message-ID: <873443344.1075401243734351169.JavaMail.root@zm06.stanford.edu>